SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 11/05/2013
Meeting End Date: 11/05/2013
Recording SEMI Standards Staff: Michael Tran
CER Posted to Web: 11/08/2013


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5622
Line Item Revision to SEMI F57-0312, Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems5622ProceduralReview.doc
Line Item 1
Revision to Table 4, Surface Extractable Metallic Contamination RequirementsPassed as balloted
Superclean
5639
Revision to SEMI C19-0708, Specification for AcetonePassed as balloted
Superclean
5639ProceduralReview.doc
5638
Revision to SEMI C18-0708, Specification for Acetic AcidFailed committee review5638BallotReviewSummary.doc
5640
Revision to SEMI C23-0708, Specifications for Buffered Oxide EtchantsFailed committee review5640BallotReviewSummary.doc
5642
Revision to SEMI C35-0708, Specifications and Guideline for Nitric Acid with title change to: Specification and Guide for Nitric AcidFailed committee review5642BallotReviewSummary.doc
5643
Revision to SEMI C44-0708, Specifications and Guidelines for Sulfuric Acid with title change to: Specification and Guide for Sulfuric AcidPassed as balloted with editorial changes5643ProceduralReview.doc


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
5675
SNARFDetermining Roughness of Polymer Surfaces Task ForceNew Standard: Test Method for Determining Roughness Of Polymer Surfaces Used In Ultrapure Water and Liquid Chemical Distribution Systems By Contact Profilometry
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots

#
When
SC/TF/WG
Details
5675
Cycle 2, 2014Determining Roughness of Polymer Surfaces Task ForceNew Standard: Test Method for Determining Roughness Of Polymer Surfaces Used In Ultrapure Water and Liquid Chemical Distribution Systems By Contact Profilometry
5638A
Cycle 1 or 2, 2014Analytical Methods TFRevision to SEMI C18-0708, Specification for Acetic Acid
5640A
Cycle 1 or 2, 2014Analytical Methods TFRevision to SEMI C23-0708, Specifications for Buffered Oxide Etchants
5528
Cycle 1 or 2, 2014SEMI F31, F39, F41 Review TFRevision to SEMI F39-0699, Guideline for Chemical Blending Systems with title change to: Guide for Chemical Blending Systems
5642A
Cycle 1 or 2, 2014Analytical Methods TFRevision to SEMI C35-0708, Specifications and Guideline for Nitric Acid with title change to: Specification and Guide for Nitric Acid


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
The next N.A. Liquid Chemicals standards meetings are tentatively scheduled for March 31 – April 1, 2014 at SEMI Headquarters in San Jose, California in conjunction with the NA Standards Spring 2014 meetings. Exact meeting dates and details will be announced when finalized and will be available at: http://www.semi.org/node/47781

Tentative Schedule:


Monday, March 31*
– Polymer Surface Roughness TF (1:00 PM to 2:00 PM)
– SEMI IX Resin TF (2:00 PM to 3:00 PM)
– UPW Filtration TF/ F63 TF (3:00 PM to 5:00 PM)

Tuesday, April 01*
– F57 Discussion/ITRS Alignment (8:00 AM to 9:00 AM)
– F39, F31& F41 Rewrite TF (9:00 AM to 10:00 AM)
– Analytical Methods TF (10:00 AM to 12 Noon)
– Liquid Chemicals Committee (1:00 PM to 4:00 PM)

*All times are in PST. Times and dates are subject to change without notice.
For meeting details, registration, the latest schedule, and travel information please visit
http://www.semi.org/node/47781