SEMI International Standards
Standards Locale: North America |
Committee: Liquid Chemicals |
Place of Meeting: SEMI Headquarters in San Jose, California |
Date of Meeting: 11/05/2013 |
Meeting End Date: 11/05/2013 |
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Recording SEMI Standards Staff: Michael Tran |
CER Posted to Web: 11/08/2013 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5622 | Line Item Revision to SEMI F57-0312, Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems | | |
Line Item 1 | Revision to Table 4, Surface Extractable Metallic Contamination Requirements | Passed as balloted
Superclean | |
5639 | Revision to SEMI C19-0708, Specification for Acetone | Passed as balloted
Superclean | |
5638 | Revision to SEMI C18-0708, Specification for Acetic Acid | Failed committee review | |
5640 | Revision to SEMI C23-0708, Specifications for Buffered Oxide Etchants | Failed committee review | |
5642 | Revision to SEMI C35-0708, Specifications and Guideline for Nitric Acid with title change to: Specification and Guide for Nitric Acid | Failed committee review | |
5643 | Revision to SEMI C44-0708, Specifications and Guidelines for Sulfuric Acid with title change to: Specification and Guide for Sulfuric Acid | Passed as balloted with editorial changes | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
5675 | SNARF | Determining Roughness of Polymer Surfaces Task Force | New Standard: Test Method for Determining Roughness Of Polymer Surfaces Used In Ultrapure Water and Liquid Chemical Distribution Systems By Contact Profilometry |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
5675 | Cycle 2, 2014 | Determining Roughness of Polymer Surfaces Task Force | New Standard: Test Method for Determining Roughness Of Polymer Surfaces Used In Ultrapure Water and Liquid Chemical Distribution Systems By Contact Profilometry |
5638A | Cycle 1 or 2, 2014 | Analytical Methods TF | Revision to SEMI C18-0708, Specification for Acetic Acid |
5640A | Cycle 1 or 2, 2014 | Analytical Methods TF | Revision to SEMI C23-0708, Specifications for Buffered Oxide Etchants |
5528 | Cycle 1 or 2, 2014 | SEMI F31, F39, F41 Review TF | Revision to SEMI F39-0699, Guideline for Chemical Blending Systems with title change to: Guide for Chemical Blending Systems |
5642A | Cycle 1 or 2, 2014 | Analytical Methods TF | Revision to SEMI C35-0708, Specifications and Guideline for Nitric Acid with title change to: Specification and Guide for Nitric Acid |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next N.A. Liquid Chemicals standards meetings are tentatively scheduled for March 31 – April 1, 2014 at SEMI Headquarters in San Jose, California in conjunction with the NA Standards Spring 2014 meetings. Exact meeting dates and details will be announced when finalized and will be available at: http://www.semi.org/node/47781
Tentative Schedule:
Monday, March 31*
– Polymer Surface Roughness TF (1:00 PM to 2:00 PM)
– SEMI IX Resin TF (2:00 PM to 3:00 PM)
– UPW Filtration TF/ F63 TF (3:00 PM to 5:00 PM)
Tuesday, April 01*
– F57 Discussion/ITRS Alignment (8:00 AM to 9:00 AM)
– F39, F31& F41 Rewrite TF (9:00 AM to 10:00 AM)
– Analytical Methods TF (10:00 AM to 12 Noon)
– Liquid Chemicals Committee (1:00 PM to 4:00 PM)
*All times are in PST. Times and dates are subject to change without notice.
For meeting details, registration, the latest schedule, and travel information please visit http://www.semi.org/node/47781
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