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Standards Locale: North America

Committee: Facilities & Gases

Place of Meeting: SEMI HQ

Date of Meeting: 04/04/2017

Meeting End Date: 04/04/2017

Recording SEMI Standards Staff: Laura Nguyen

CER Posted to Web: 04/18/2017

WG/TF/SC/TC Name	Previous Leader	New Leader
Facilities
None
Gases
Mass Flow Controller Task Force		Erica Kitano
Filters & Purifiers Task Force		Joyce Chen

Document #	Document Title	Committee Action	A&R Forms for Approved Ballots
Facilities
6110	Reapproval of SEMI F4-0211, Specification for Pneumatically Actuated Cylinder Valves	Failed, returned to the TF for rework and reballot
6109	Reapproval of SEMI F32-0211, Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves	Failed, returned to the TF for rework and reballot
6120	Reapproval of SEMI E137-0705 (Reapproved 1111), Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment	Passed, as balloted	6120ProceduralReview_pass.pdf
6105	Revision to SEMI F51-1115, Guide for Elastometric Sealing Technology	Passed, Ratification Ballot to be issued	6105ProceduralReview_pass.pdf
Gases
6054A	Line Item Revisions to SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow Controller		6054AProceduralReview_pass.pdf
Line Item 1	Modify Terminology Section 4.1.9	Passed, Superclean
Line Item 2	Modify Terminology Section 4.1.10.1	Passed, Superclean
Line Item 3	Modify Terminology Section 4.1.10.2	Passed, with editorial changes
Line Item 4	Modify Terminology Section 4.1.10.3	Passed, Superclean
6055A	Line Item Revisions to SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter Linearity		6055AProceduralReview_pass.pdf
Line Item 1	Change “shall” to “should” throughout per Style Manual	Passed, Superclean
6056A	Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller with title change to Guide for Pressure Parameters of the Mass Flow Controller	Failed, returned to the TF for rework and reballot
6111	Reapproval of SEMI F6-92, Guide for Secondary Containment of Hazardous Gas Piping Systems	Failed, returned to the TF for rework and reballot
6106	Reapproval of SEMI F13-1101, Guide for Gas Source Control Equipment	Failed, returned to the TF for rework and reballot
6107	Reapproval of SEMI F14-93 (Reapproved 0699), Guide for the Design of Gas Source Equipment Enclosures	Failed, returned to the TF for rework and reballot
6108	Reapproval of SEMI F20-0706E (Reapproved 0611), Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications	Passed, Superclean	6108ProceduralReview_pass.pdf
6123	Reapproval of SEMI F81-0611, Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications	Passed, Superclean	6123ProceduralReview_pass.pdf
6122	Reapproval of SEMI F78-0611, Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications	Passed, Superclean	6122ProceduralReview_pass.pdf
6125	Line Item Revision to Correct the Nonconforming Title of SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases
Line Item 1	Correct nonconforming title per SEMI Standards Procedure Manual	Failed, returned to the TF for rework and reballot
6126	Line Item Revision to Correct the Nonconforming Title of SEMI F24-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Inert Specialty Gases		6126ProceduralReview_pass.pdf
Line Item 1	Correct nonconforming title per SEMI Standards Procedure Manual	Passed, as balloted
6127	Line Item Revision to Correct the Nonconforming Title of SEMI F25-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Oxidant Specialty Gases		6127ProceduralReview_pass.pdf
Line Item 1	Correct nonconforming title per SEMI Standards Procedure Manual	Passed, as balloted
6128	Line Item Revision to Correct the Nonconforming Title of SEMI F26-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Toxic Specialty Gases		6128ProceduralReview_pass.pdf
Line Item 1	Correct nonconforming title per SEMI Standards Procedure Manual	Passed, as balloted
6121	Reapproval of SEMI E67-1011, Test Method for Determining Reliability of Mass Flow Controller	Passed, Superclean	6121ProceduralReview_pass.pdf
6119	Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with title change to Test Method for Measurement of Mass Flow Controller Transient Characteristics	Passed, Ratification Ballot to be issued	6119ProceduralReview_pass.pdf
6140	Reapproval of SEMI C3.2-0611, Specification for Arsine (AsH3) in Cylinders, 99.94% Quality	Passed, Superclean	6140ProceduralReview_pass.pdf
6138	Reapproval of SEMI C3.27-1102 (Reapproved 1011), Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality	Passed, Superclean	6138ProceduralReview_pass.pdf
6139	Reapproval of SEMI C3.39-1011, Specification for Nitrogen Trifluoride (NF3), 99.98%	Passed, Superclean	6139ProceduralReview_pass.pdf
6143	Reapproval of SEMI C3.40-1011, Specification for Carbon Tetrafluoride (CF4), 99.997% Quality	Passed, Superclean	6143ProceduralReview_pass.pdf
6141	Reapproval of SEMI C3.47-1011, Specification for Hydrogen Bromide (HBr), 99.98% Quality	Passed, Superclean	6141ProceduralReview_pass.pdf
6142	Reapproval of SEMI C3.55-1011, Specification for Silane (SiH4), Bulk, 99.994% Quality	Passed, Superclean	6142ProceduralReview_pass.pdf
6137	Reapproval of SEMI C55-1104 (Reapproved 0211), Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality	Passed, Superclean	6137ProceduralReview_pass.pdf

Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#	SC/TF/WG	Details
Facilities
5155A	BIM TF	New Standard: Guide for Facilities Data Package for Semiconductor Equipment Installation and Building Information Modeling
Gases
6125	Gases Specification TF	Line Item Revision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases – Revise SNARF to address the negative
6178	Materials of Construction of Gas Delivery Systems TF	Line Item Revision to Correct the Title of SEMI F37-0299 (Reapproved 0611), Method for Determination of Surface Roughness Parameters for Gas Distribution System Components
6188	Filters & Purifiers TF	Reapproval of SEMI F54-1000 (Reapproved 1110), Test Method for Measuring the Counting Efficiency of Condensation Nucleus Counters
6181	Filters & Purifiers TF	Reapproval of SEMI F76-0303 (Reapproved 1110), Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas
6180	Mass Flow Controller TF	Reapproval of SEMI F64-0701 (Reapproved 1111), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers
6186	Gases Specification TF	Reapproval of SEMI C3.58-1011, Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
6182	Gases Specification TF	Reapproval of SEMI C9.1-0212, Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
TBD	Gases Specification TF	Revision with title change to SEMI C6.2-93 (Reapproved 1111), Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas – Send out for two-week TC member review, followed by GCS
TBD	Gases Specification TF	Revision with title change to SEMI C6.3-89 (Reapproved 1111), Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas – Send out for two-week TC member review, followed by GCS
TBD	Gases Specification TF	Revision with title change to SEMI C6.4-90 (Reapproved 1111), Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas – Send out for two-week TC member review, followed by GCS
TBD	Gases Specification TF	Revision with title change to SEMI C6.5-90 (Reapproved 1111), Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas – Send out for two-week TC member review, followed by GCS
TBD	Gases Specification TF	Revision with title change to SEMI C6.6-90 (Reapproved 1111), Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas – Send out for two-week TC member review, followed by GCS
TBD	Gases Specification TF	Revision with title change to SEMI C6.7-93 (Reapproved 1111), Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders – Send out for two-week TC member review, followed by GC

Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots

#	When	TF	Details
Facilities
5155A	Cycle 5, 2017	BIM TF	New Standard: Guide for Facilities Data Package for Semiconductor Equipment Installation and Building Information Modeling
R6105	Cycle 4, 2017	F51 Revision TF	Revision to SEMI F51-1115, Guide for Elastometric Sealing Technology
Gases
R6119	Cycle 4, 2017	Mass Flow Controller TF	Revision to SEMI E17-1011, Test Method for Measurement of Mass Flow Controller Transient Characteristics
6056B	Cycle 5, 2017	Mass Flow Controller TF	Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller with title change to Guide for Pressure Parameters of the Mass Flow Controller
6125A	Cycle 5, 2017	Gases Specification TF	Line Item Revisions to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases
6178	Cycle 4, 2017	Materials of Construction of Gas Delivery Systems TF	Line Item Revision to Correct the Title of SEMI F37-0299 (Reapproved 0611), Method for Determination of Surface Roughness Parameters for Gas Distribution System Components
6188	Cycle 4, 2017	Filters & Purifiers TF	Reapproval of SEMI F54-1000 (Reapproved 1110), Test Method for Measuring the Counting Efficiency of Condensation Nucleus Counters
6181	Cycle 4, 2017	Filters & Purifiers TF	Reapproval of SEMI F76-0303 (Reapproved 1110), Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas
6180	Cycle 4, 2017	Mass Flow Controller TF	Reapproval of SEMI F64-0701 (Reapproved 1111), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers
6186	Cycle 5, 2017	Gases Specification TF	Reapproval of SEMI C3.58-1011, Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
6182	Cycle 5, 2017	Gases Specification TF	Reapproval of SEMI C9.1-0212, Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
TBD	Cycle 5, 2017	Gases Specification TF	Revision with title change to SEMI C6.2-93 (Reapproved 1111), Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
TBD	Cycle 5, 2017	Gases Specification TF	Revision with title change to SEMI C6.3-89 (Reapproved 1111), Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas
TBD	Cycle 5, 2017	Gases Specification TF	Revision with title change to SEMI C6.4-90 (Reapproved 1111), Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
TBD	Cycle 5, 2017	Gases Specification TF	Revision with title change to SEMI C6.5-90 (Reapproved 1111), Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
TBD	Cycle 5, 2017	Gases Specification TF	Revision with title change to SEMI C6.6-90 (Reapproved 1111), Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
TBD	Cycle 5, 2017	Gases Specification TF	Revision with title change to SEMI C6.7-93 (Reapproved 1111), Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
The next meeting of the Facilities & Gases Joint NA TC Chapter is scheduled for Tuesday, July 11, 2017 at the SEMICON West 2017 North America Standards Meetings in San Francisco, California.
For more information, please visit: http://www.semi.org/en/standards