SEMI International Standards
Standards Locale: Europe |
Committee: Gases & Liquid Chemicals |
Place of Meeting: Alpexpo - Grenoble_France |
Date of Meeting: 10/07/2014 |
Meeting End Date: 10/07/2014 |
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Recording SEMI Standards Staff: Andrea Busch |
CER Posted to Web: 10/22/2014 |
Leadership Changes
Group | Previous Leader | New Leader |
Solvents in advanced processes TF | G De Vos | Position is open |
Technical Committee | G De Vos (vice-chair) | Position is open |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action |
5656 | Revision to SEMI C65 0308 with title change to: Guide For Trimethylsilane (3MS), 99.995% Quality | Failed |
5657 | Revision to SEMI C66 0308 with title change to: Guide For Trimethylaluminium (TMAl), 99.5% Quality | Failed |
5658 | New Standard: Guide for Pentakis (Dimethylamino) Tantalum (PDMAT) | Failed |
5492 | New Standard: Guide for Ethylene Glycol | Approved |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
# | When | SC/TF/WG | Details |
5765 | 2015 | Permeation tubes for Trace Moisture Calibration | Ballot 5765 : Revision to SEMI C15 : Test Method for ppm and ppb humidity standards will be prepared for balloting next year. |
5656, 5657, 5658 | 2015 | Precursor Specifications TF | These documents failed Technical Committee Review due to the legitimacy of reject comments. The comments will be taken into account and these documents will be re-balloted in 2015. |
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SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
To be confirmed.
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