SEMI International Standards
Standards Locale: Europe
Committee: Gases & Liquid Chemicals
Place of Meeting: Alpexpo - Grenoble_France
Date of Meeting: 10/07/2014
Meeting End Date: 10/07/2014
Recording SEMI Standards Staff: Andrea Busch
CER Posted to Web: 10/22/2014


Leadership Changes

Group
Previous Leader
New Leader
Solvents in advanced processes TFG De Vos Position is open
Technical CommitteeG De Vos (vice-chair) Position is open


Committee Structure Changes
None.

Ballot Results


Document #
Document Title
Committee Action
5656Revision to SEMI C65 0308 with title change to: Guide For Trimethylsilane (3MS), 99.995% QualityFailed
5657Revision to SEMI C66 0308 with title change to: Guide For Trimethylaluminium (TMAl), 99.5% QualityFailed
5658New Standard: Guide for Pentakis (Dimethylamino) Tantalum (PDMAT)Failed
5492New Standard: Guide for Ethylene GlycolApproved



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots

#
When
SC/TF/WG
Details
57652015Permeation tubes for Trace Moisture CalibrationBallot 5765 : Revision to SEMI C15 : Test Method for ppm and ppb humidity standards will be prepared for balloting next year.
5656, 5657, 56582015Precursor Specifications TFThese documents failed Technical Committee Review due to the legitimacy of reject comments. The comments will be taken into account and these documents will be re-balloted in 2015.
.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
To be confirmed.