SEMI Standards Committee Informational Ballots

Informational Ballots are usually distributed either for comment or information prior to sending Letter Ballots. An Informational Ballot is a mechanism for refining a document before it is balloted as a Letter Ballot. Return of this ballot is optional. The Informational Ballot is a tool created by staff for member input, and is not described in the SEMI Regulations.

The following documents have been issued as informational ballots by the indicated global committee.

Doc #

Document Title

Global Committee

Download Link

Voting Link


Revision to SEMI P44, Specification for Open Artwork System Interchange Standard (OASIS) Specific to VSB Mask Writers


Download PDF 232.7K



New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model for Generic Equipment add-on Sensor (ADDON)

Information & Control

Download PDF 182.6K



New Standard: Guide for Measuring Dimensions for Plastic Films/Substrates

Flat Panel Display (FPD) - Materials & Components

Download PDF 74.0K


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For further information, please contact the SEMI Standards Engineer/Coordinator nearest you.