SEMI Standards Committee Informational Ballots

Informational Ballots are usually distributed either for comment or information prior to sending Letter Ballots. An Informational Ballot is a mechanism for refining a document before it is balloted as a Letter Ballot. Return of this ballot is optional. The Informational Ballot is a tool created by staff for member input, and is not described in the SEMI Regulations.

The following documents have been issued as informational ballots by the indicated global committee.

Doc #

Document Title

Global Committee

Download Link

Voting Link

5229A

Revision to SEMI P44, Specification for Open Artwork System Interchange Standard (OASIS) Specific to Mask Tools

Micropatterning

Download PDF 302.8K

Vote

5274AInfo

Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard

Information & Control

Download PDF 235.1K

Vote


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