SEMI Standards Committee Informational Ballots

Informational Ballots are usually distributed either for comment or information prior to sending Letter Ballots. An Informational Ballot is a mechanism for refining a document before it is balloted as a Letter Ballot. Return of this ballot is optional. The Informational Ballot is a tool created by staff for member input, and is not described in the SEMI Regulations.

The following documents have been issued as informational ballots by the indicated global committee.

Doc #

Document Title

Global Committee

Download Link

Voting Link


Revision to SEMI E10-0814E: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization


Download PDF 1,522.5K



Revision to SEMI E79-0814E: Specification for Definition and Measurement of Equipment Productivity


Download PDF 709.7K


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For further information, please contact the SEMI Standards Engineer/Coordinator nearest you.