SEMI Standards Committee Informational Ballots
Informational Ballots are usually distributed either for comment or information prior to sending Letter Ballots. An Informational Ballot is a mechanism for refining a document before it is balloted as a Letter Ballot. Return of this ballot is optional. The Informational Ballot is a tool created by staff for member input, and is not described in the SEMI Regulations.
The following documents have been issued as informational ballots by the indicated global committee.
Revision to SEMI P44, Specification for Open Artwork System Interchange Standard (OASIS) Specific to VSB Mask Writers
Download PDF 232.7K
New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network
Specific Device Model for Generic Equipment add-on Sensor (ADDON)
Information & Control
Download PDF 182.6K
New Standard: Guide for Measuring Dimensions for Plastic Films/Substrates
Flat Panel Display (FPD) - Materials & Components
Download PDF 74.0K
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