SEMI Standards Committee Informational Ballots

Informational Ballots are usually distributed either for comment or information prior to sending Letter Ballots. An Informational Ballot is a mechanism for refining a document before it is balloted as a Letter Ballot. Return of this ballot is optional. The Informational Ballot is a tool created by staff for member input, and is not described in the SEMI Regulations.

The following documents have been issued as informational ballots by the indicated global committee.

Doc #

Document Title

Global Committee

Download Link

Voting Link

5274AInfo

Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard

Information & Control

Download PDF 235.1K

Vote


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