SEMI International Standards
| Standards Locale: North America |
| Committee: Liquid Chemicals |
| Place of Meeting: SEMI Headquarters, Milpitas, California/USA |
| Date of Meeting: 03/26/2024 |
| Meeting End Date: 03/26/2024 |
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| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 04/09/2024 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 7091A | Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems, with title change to: Test Method and Specification for Testing of Perfluoroalkoxy (PFA) and Other Fluorinated Materials Used in Liquid Chemical Distribution Systems | Passed, as balloted. |  7091A_ProceduralReview.pdf |
| 7141 | Revision to SEMI C21-0618, Specification and Guide for Ammonium Hydroxide | Failed | |
| 7142 | Revision to SEMI C28-0618, Specification and Guide for Hydrofluoric Acid | Failed | |
| 7143 | Revision to SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) | Failed | |
| 7144 | Revision to SEMI C35-0118, Specification and Guide for Nitric Acid | Failed | |
| 7145 | Revision to SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% Solution | Failed | |
| 7146 | Revision to SEMI C41-0618, Specification and Guide for 2-Propanol | Failed | |
| 7147 | Revision to SEMI C45-0518, Specification and Guide for Tetraethylorthosilicate (TEOS) | Failed | |
| 7148 | Revision to SEMI C62-0309 (Reapproved 0618), Specification for Porogen Precursors Used in Low K CVD Processes | Failed | |
| 7149 | Revision to SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes | Failed | |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
Document # | Document Title | ISC A&R Action | A&R Forms |
| R6828D | Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems | TB submitted |  R6828D_ProceduralReview.pdf |
Note 1: Passed Ratification ballots will be submitted to SEMI publication for final processing.
Note 2: Failed Ratification ballots were returned to the originating task forces for re-work and re-balloting or abandoning.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 6601 | Ballot Authorization | High Purity Polymer Materials and Components TF | New Standard: Guide to Meet IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
– Approved by GCS on 03/14/2024 |
| 7087 | Ballot Authorization | Ultra Pure Water TF | Revision to SEMI F63-0521, Guide for Ultrapure Water Used in Semiconductor Processing
– Approved by GCS on 03/06/2024 |
| 7214 | SNARF | High Purity Liquid Assemblies & Systems TF | Revision of SEMI F41-1116, Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing
– Approved by GCS on 02/22/2024 |
Authorized Activities
None.
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| 6601 | Cycle 4, 2024 | High Purity Polymer Materials and Components TF | New Standard: Guide to Meet IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water |
| 7006 | Cycle 4, 2024 | High Purity Polymer Materials and Components TF | Revision to SEMI C69-1015 (Reapproved 1220), Test Method for the Determination of Surface Areas of Polymer Pellets |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for the week of July 8-11, in conjunction with SEMICON West 2024 in San Francisco, California. Schedule details TBD. Please check www.semi.org/standards for updates.
Tentative Schedule TBD:
Task Forces will continue to meet on their weekly/bi-weekly cadence. Subject to change.
Monday, July 8: (Open for meetings)
Tuesday, July 9
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting (Day 1 – traditional reports and voting)
Wednesday, July 10
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting (Day 2 – voting and authorizations)
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