SEMI International Standards
Standards Locale: North America
Committee: Metrics
Place of Meeting: Moscone Center, San Francisco, CA
Date of Meeting: 07/10/2019
Meeting End Date: 07/10/2019
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 07/18/2019


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6472New Standard: Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer ProcessingPassed, Ratification Ballot to be issued
6508Reapproval to SEMI E43-0813: Guide for Electrostatic Measurements on Objects and SurfacesPassed


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
TBDSNARFEq RAMPRevision to SEMI E10-0814E: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
New SNARF to be distributed for 2 week review followed by GCS approval
TBDSNARFEq RAMPRevision to SEMI E79-0814E: Specification for Definition and Measurement of Equipment Productivity
New SNARF to be distributed for 2 week review followed by GCS approval
TBDSNARFn/aReapproval to SEMI E165-0813: Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available
TBDSNARFn/aReapproval to SEMI E150-0314: Guide for Equipment Training Best Practices
TBDSNARFn/aReapproval to SEMI E149-0314: Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment


Authorized Ballots

#
When
TF
Details
R6472Cycle
6-2019		CCC TM TFNew Standard: Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer Processing
TBDCycle
6 or 7 2019		n/aReapproval to SEMI E165-0813: Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available
TBDCycle
6 or 7 2019		n/aReapproval to SEMI E150-0314: Guide for Equipment Training Best Practices
TBDCycle
6 or 7 2019		n/aReapproval to SEMI E149-0314: Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

Standards Fall 2019 Meetings, SEMI HQ, Milpitas CA

Tuesday, Nov 5, 2019 (Tentative)

        · EMC TF (11:00 – 12:00)

        · ESD/ESC TF (13:00 – 14:30)

        · Critical Chamber Components (CCC) Test Methods TF (14:30 – 16:30)

        · MOD TF (17:00 – 18:00)

Wednesday, Nov 6, 2019 (Tentative)
        · Equipment RAMP Metrics TF (9:00 – 11:00)

        · RF Measurements TF (12:30-14:30)

        · Metrics NA TC Chapter (15:00 – 18:00)

For more information, please visit Standards Calendar at http://www.semi.org/en/standards