SEMI International Standards
Standards Locale: Europe
Committee: Compound Semiconductor Materials
Place of Meeting: Official Virtual TC Chapter Meeting
Date of Meeting: 01/28/2021
Meeting End Date: 01/28/2021
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 01/28/2021


Leadership Changes
None.

Committee Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Change
5 Year Review Task Force (New TF)
Full-Wafer TSD Density Mapping of 4H-SiC Task Force (New TF)
M82 Revision Task Force (Disbanded)
M83 Revision Task Force (Disbanded)


Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6716SNARFFull-Wafer TSD Density Mapping of 4H-SiC TFNew Standard: Test Method for quantifying TSDs in 4H-SiC Crystals


Authorized Ballots

#
When
TF
Details
6615Cycle 2-21SiC Material and Wafer Specification TFRevision of SEMI M55-0817, Specification for Polished Monocrystalline Silicon Carbide Wafers


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
Tentative April 29, 2021 via Official Virtual TC Chapter meeting. Please check www.semi.org/standards for latest information