SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: OVTCCM
Date of Meeting: 02/22/2021
Meeting End Date:
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 03/09/2021


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Facilities
None
Gases
Heater Jacket Task ForceDavid Colquhoun (BriskHeat)Adam Goler (Pivotal Systems)
David Colquhoun (BriskHeat)


Committee Structure Changes
None.

Ballot Results

The following Letter Ballot Reviews were approved by GCS to be transferred to the Japan Gases TC Chapter and adjudicated on December 22, 2020.

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
Facilities
None
Gases
6656Line Item Revision to SEMI C3.6-0710 (Reapproved 0815), Specification for Phosphine (PH3) in Cylinders, 99.98% QualityBallot Line-Item report template_6656_20201211.pdf
Line Item 1Update “Referenced Standards and Documents” Section.Passed, as balloted
Line Item 2Change “Specifications” section heading to “Requirements” per Procedure Manual.Passed, as balloted
Line Item 3Address trademark(s) per Regulations § 16.4.4.Passed, as balloted
6657Line Item Revision to SEMI C3.35-1109E (Reapproved 0815), Specification for Hydrogen Chloride (HCI), 99.997% QualityBallot Line-Item report template_6657_20201211r1.pdf
Line Item 1Change “Specifications” section heading to “Requirements” per Procedure Manual.Passed, as balloted
Line Item 2Address trademark(s) per Regulations § 16.4.4.Passed, as balloted
6658Line Item Revision to SEMI C71-0815, Specification and Guide for Boron Trichloride (BCI3)Ballot Line-Item report template_6658_20201211.pdf
Line Item 1Update “Referenced Standards and Documents” Section.Passed, as balloted
Line Item 2Address trademark(s) per Regulations § 16.4.4.Passed, as balloted
6616Revision to SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow ControllersPassed, as ballotedBallot Report Template_6616_20201211.pdf
6623Reapproval for SEMI F72-0214, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel ComponentsPassed, with editorial change(s)Ballot Report Template_6623_20201211.pdf
6643New Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT Ports in Mass Flow Controllers and Mass Flow MetersFailed
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
Facilities
6628SNARFBIM TFNew Standard: Guide for Facilities Data Package for Semiconductor Equipment Installation and Building Information Modeling
– TC Member Review took place between 11/20/2019-12/03/2019
– Approved by GCS on 01/20/2020
6628Ballot Authorization BIM TFNew Standard: Guide for Facilities Data Package for Semiconductor Manufacturing Equipment Installation and Building Information Modeling
– Approved by GCS on 01/06/2021
Gases
6616SNARFMass Flow Controller TFNew Standard: Guide for Facilities Data Package for Semiconductor Manufacturing Equipment Installation and Building Information Modeling
– Approved by GCS on 01/06/2021
6616Ballot AuthorizationMass Flow Controller TFRevision to SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
– Approved by GCS on 01/17/2020
6656SNARF/ Ballot AuthorizationGases Specification TFLine Item Revision to SEMI C3.6-0710 (Reapproved 0815), Specification for Phosphine (PH3) in Cylinders, 99.98% Quality
–Approved by GCS on 05/29/2020
6657SNARF/ Ballot AuthorizationGases Specification TFLine Item Revision to SEMI C3.35-1109E (Reapproved 0815), Specification for Hydrogen Chloride (HCI), 99.997% Quality
–Approved by GCS on 05/29/2020
6658SNARF/ Ballot AuthorizationGases Specification TFLine Item Revision to SEMI C71-0815, Specification and Guide for Boron Trichloride (BCI3)
–Approved by GCS on 05/29/2020
6643SNARF/ Ballot AuthorizationMass Flow Controller TFNew Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT ports for Mass Flow Meters and Mass Flow Controllers
– TC Member Review took place between 03/23/2020-04/05/2020
– Approved by GCS on 04/20/2020
-
Adjudication Locale TransferGases NA TC ChapterTransfer responsibilities for Letter Ballot review from the North America Chapter to the Japan Chapter for NA Ballots 6616, 6623, 6643, 6656, 6657, and 6658.
–Approved by GCS on 12/02/2020


Authorized Activities
Listing of all revised or new SNARF(s) approved by the TC Chapter.
#
Type
SC/TF/WG
Details
Facilities
TBDSNARFFacilities NAReapproval of SEMI E76, F49, F50, E70, E6.
Gases
TBDSNARFGases NAReapproval of SEMI F43, F59, F67, F68, F72, F79, F105, F60, F73, F28, E77, F77, E80, C3.34, and C3.12.
TBDSNARFGases NALine Item SNARFs for SEMI C88, C91, and C92.
#1: SNARFs and TFOFs are available for review on the SEMI Web site at:

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots
Listing of documents authorized by the TC Chapter for Letter Ballot.
#
When
TF
Details
Facilities
TBDCycle 4, 5 and, 6-2021Facilities NAReapproval of SEMI E76, F49, F50, E70, E6.
Gases
TBDCycle 4, 5 and, 6-2021Gases NAReapproval of SEMI F43, F59, F67, F68, F72, F79, F105, F60, F73, F28, E77, F77, E80, C3.34, and C3.12.
6582Cycle 5-2021Materials of Construction of Gas Delivery Systems TFTest Method for The Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas Systems
6643ACycle 3-2021Mass Flow ControllerNew Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT Ports in Mass Flow Controllers and Mass Flow Meters
TBDCycle 4-2021Gases NALine Item SNARF for SEMI C88, C91, and C92.


SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
Facilities
None
Gases
6394Materials of Construction of Gas Delivery Systems TFLine Item Revision to SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems02/22/2022


SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting is tentatively scheduled for July 12-13, 2021 TBD [Hybrid]. For more information, please visit the Standards Calendar at http://www.semi.org/standards.