SEMI International Standards
Standards Locale: Europe |
Committee: Silicon Wafer |
Place of Meeting: Munich, Germany |
Date of Meeting: 11/13/2019 |
Meeting End Date: 11/13/2019 |
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Recording SEMI Standards Staff: James Amano |
CER Posted to Web: 11/21/2019 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
6574 | Reapproval of SEMI M58-1109 (Reapproved 0614)E Test Method For Evaluating DMA Based Particle Deposition Systems And Processes | Passed | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
6462 | SNARF revision | Int'l Polished Wafer TF | Line Item Revision to SEMI M1-0918 Specification for Polished Single Crystal Silicon Wafers: Move Flatness and Shape Illustrations to Related Information - activity moved from AWG TF to IPW TF |
6613 | SNARF | Advanced Wafer Geometry TF | Reapproval of SEMI M20-0215, Practice for Establishing a Wafer Coordinate System |
Authorized Ballots
# | When | TF | Details |
6363 | Cycle 1, 2, 3, or 4-2020 | Advanced Surface Inspection TF | Revision of SEMI M52-0214: Guide For Specifying Scanning Surface Inspection Systems For Silicon Wafers For The 130 Nm To 11 Nm Technology Generations |
6462 | Cycle 1, 2, 3, or 4-2020 | Int'l Polished Wafer TF | Line Item Revision to SEMI M1-0918 Specification for Polished Single Crystal Silicon Wafers: Move Flatness and Shape Illustrations to Related Information - activity moved from AWG TF to IPW TF |
6613 | Cycle 1, 2, 3, or 4-2020 | Advanced Wafer Geometry TF | Reapproval of SEMI M20-0215, Practice for Establishing a Wafer Coordinate System |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
In conjunction with SEMICON Europa 2020 in Munich, Germany. Check the events page at https://www.semi.org/en/collaborate/standards for details.
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