SEMI International Standards
Standards Locale: Japan |
Committee: Metrics |
Place of Meeting: Tokyo Big Sight, Tokyo, Japan |
Date of Meeting: 12/12/2019 |
Meeting End Date: 12/12/2019 |
|
Recording SEMI Standards Staff: Chie Yanagisawao |
CER Posted to Web: 12/24/2019 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
6550 | Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems | Failed and returned to TF for rework | 6650_BallotReport_Failed.pdf |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
6550A | TBD | RF Measurement liaison TF | Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled as follows.
· Date: Friday, July 3, 2020, 14:00-17:00
· Place: SEMI Japan office, Tokyo, Japan
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