SEMI International Standards
Standards Locale: Japan
Committee: Metrics
Place of Meeting: SEMI Japan office, Tokyo, Japan
Date of Meeting: 09/04/2020
Meeting End Date: 09/04/2020
Recording SEMI Standards Staff: Chie Yanagisawa
CER Posted to Web: 09/18/2020


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6578Revision to SEMI E10-0814E
SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION
Failed and returned to TF for rework6578_BallotReport_v3.pdf6578_BallotReport_v3.pdf
6579Revision to SEMI E79-0814E
SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT PRODUCTIVITY
Failed and returned to TF for rework6579_BallotReport_v3.pdf6579_BallotReport_v3.pdf
6599Line-Item Revision to SEMI E180-1219,
TEST METHOD FOR MEASURING SURFACE METAL CONTAMINATION THROUGH ICP-MS OF CRITICAL CHAMBER COMPONENTS USED IN SEMICONDUCTOR WAFER PROCESSING
--6599_BallotReport_v2.pdf6599_BallotReport_v2.pdf
Line Item 1SEMI E180 - To clarify what is discarded after the extraction solution is collectedPassed as balloted--
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status

Standard Designation
Title
None*There is no published Standards originated by the Japan TC Chapter.


Special Announcements of the Committee (Workshops, Programs, etc.)
The Metrics Japan TC Chapter conducted a simulation of an Official Virtual TC Chapter Meeting during Ballot Review section of this meeting.
The Metrics Japan TC Chapter to choose opt-in for Official Virtual TC Chapter meeting.

Next Meeting
TBD