SEMI International Standards
Standards Locale: North America
Committee: Micropatterning
Place of Meeting: Online
Date of Meeting: 03/28/2023
Meeting End Date: 03/28/2023
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 04/12/2023


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
6821New Preliminary Standard: SPECIFICATION FOR EXPERIMENTAL CURVILINEAR “MULTIGON” EXTENSION TO SEMI P39 OASISApproved6821_Ballot Report.pdf6821_Ballot Report.pdf


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting


Authorized Activities

#
Type
SC/TF/WG
Details
7027SNARFTC ChapterReapproval of SEMI P39-0416 Specification for OASIS® – Open Artwork System Interchange Standard
7026SNARFTC ChapterReapproval of SEMI P44-1216 Specification for Open Artwork System Interchange Standard (OASIS ®) Specific to Mask Tools



Authorized Ballots

#
When
TF
Details
7027cycle 4-23TC ChapterReapproval of SEMI P39-0416 Specification for OASIS® – Open Artwork System Interchange Standard
7026cycle 4-23TC ChapterReapproval of SEMI P44-1216 Specification for Open Artwork System Interchange Standard (OASIS ®) Specific to Mask Tools


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Abolished

#
TF
Title
6220Patterning Metrology Task ForceLine Item revision to SEMI P19-92 (Reapproved 0707)
SPECIFICATION FOR METROLOGY PATTERN CELLS FOR INTEGRATED CIRCUIT MANUFACTURE
6221Patterning Metrology Task ForceRevision to SEMI P18-92 (Reapproved 1104)
SPECIFICATION FOR OVERLAY CAPABILITIES OF WAFER STEPPERS


Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
October 31, 2023, 9 AM - 11 AM Pacific online. Check www.semi.org/standards for the latest update.