SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: SEMI Headquarters, Milpitas, California/USA
Date of Meeting: 04/05/2023
Meeting End Date: 04/05/2023
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 04/19/2023


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Chemical Mechanical Planarization Consumables (CMP-C) TFAlexander Tregub (Intel)Alexander Tregub (Consultant)
Michael Mills (DuPont) [New]


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
6715New Standard, Guide for Measuring Particle Precursors in Ultrapure WaterPassed, with technical changes. Ratification Ballot to be issued.6715_ProceduralReview.pdf6715_ProceduralReview.pdf
6828CRevision to SEMI F31-0313, Guide for Bulk Chemical Distribution SystemsFailed
7007Reapproval of SEMI C21-0618, Specification and Guide for Ammonium HydroxideFailed
7008Reapproval of SEMI C28-0618, Specification and Guide for Hydrofluoric AcidFailed
7009Reapproval of SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)Failed
7010Reapproval of SEMI C35-0118, Specification and Guide for Nitric AcidFailed
7011Reapproval of SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% SolutionFailed
7012Reapproval of SEMI C41-0618, Specification and Guide for 2-PropanolFailed
7013Reapproval of SEMI C45-05185, Specification and Guide for Tetraethylorthosilicate (TEOS)Failed
7014Reapproval of SEMI C62-0309 (Reapproved 0618), Specification for Progen Precursors Used in Low K CVD ProcessesFailed
7015Reapproval of SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD ProcessesFailed
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2:
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
7006SNARFHigh Purity Polymer Materials and Components TFRevision to SEMI C69-1015 (Reapproved 1220), Test Method for the Determination of Surface Areas of Polymer Pellets
– TC Member Review took place between 12/07/2022-12/20/2022
– Approved by GCS on 01/10/2023


Authorized Activities
Listing of all revised or new SNARF(s) approved by the Originating TC Chapter.
#
Type
SC/TF/WG
Details
7086SNARFUltra Pure Water TFRevision to SEMI F61–0521, Guide for Design and Operation of a Semiconductor Ultrapure Water System
7087SNARFUltra Pure Water TFRevision to SEMI F63-0521, Guide for Ultrapure Water Used in Semiconductor Processing
7088SNARFUltra Pure Water TFRevision to SEMI F75-0521, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing
7089SNARFHigh Purity Polymer Materials and Components TFLine-item revision to SEMI C78-0113 (RA 1218), Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy
7090SNARFHigh Purity Polymer Materials and Components TFLine-Item Revision to SEMI C87-0515, Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF


Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
#
When
TF
Details
6315CCycle 4, or 5-2023Chemical Analytical Methods TFRevision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide
6388BCycle 4, or 5-2023Chemical Analytical Methods TFRevision to SEMI C44-0618, Specification and Guide for Sulfuric Acid
6713Cycle 4, or 5-2023High Purity Polymer Materials and Components TFRevision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
6828DCycle 5-2023High Purity Liquid Assemblies & Systems TFRevision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems
6917Cycle 5-2023High Purity Liquid Assemblies & Systems TFRevision to SEMI F39-0621, Guide for Chemical Blending Systems
6993Cycle 4, or 5-2023Water Management TFLine-Item Revision to SEMI F98-0618, Guide for Water Reuse in Semiconductor Industry


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Abolished

#
TF
Title
7007Chemical Analytical Methods TFReapproval of SEMI C21-0618, Specification and Guide for Ammonium Hydroxide [Revision SNARF to be issued]
7008Chemical Analytical Methods TFReapproval of SEMI C28-0618, Specification and Guide for Hydrofluoric Acid
[Revision SNARF to be issued]
7009Chemical Analytical Methods TFReapproval of SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)
[Revision SNARF to be issued]
7010Chemical Analytical Methods TFReapproval of SEMI C35-0118, Specification and Guide for Nitric Acid
[Revision SNARF to be issued]
7011Chemical Analytical Methods TFReapproval of SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% Solution
[Revision SNARF to be issued]
7012Chemical Analytical Methods TFReapproval of SEMI C41-0618, Specification and Guide for 2-Propanol
[Revision SNARF to be issued]
7013Chemical Analytical Methods TFReapproval of SEMI C45-05185, Specification and Guide for Tetraethylorthosilicate (TEOS) [Revision SNARF to be issued]
7014Chemical Analytical Methods TFReapproval of SEMI C62-0309 (Reapproved 0618), Specification for Progen Precursors Used in Low K CVD Processe
[Revision SNARF to be issued]
7015Chemical Analytical Methods TFReapproval of SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes
[Revision SNARF to be issued]
7016Chemical Analytical Methods TFReapproval of SEMI C81-0113 (Reapproved 0618), Guide for Tris(Dimethylamino) Silane (3DMAS)
[SNARF Abandoned]


Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting is tentatively scheduled for the week of July 10-13, in conjunction with SEMICON West 2023. Schedule details TBD. Please check www.semi.org/standards for updates.

Tentative Schedule:


    Monday, July 10
        o 13:30-14:00, High Purity Liquid Assemblies & System TF

        o 14:00-15:00, Chemical Analytical Methods TF

        o ?? Chemical Mechanical Planarization Consumables TF

    Tuesday, July 11
        o 9:00-10:00, UPW TF

        o 10:00-11:00, Water Management TF

        o 11:00-12:00, High Purity Polymer Material & Components TF

        o ?? 13:00-14:00 Statistical Methods TF

        o 14:00-16:00 Liquid Chemicals NA TC Chapter Meeting – Day 1

    Wednesday, July 12
        o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting – Day 2