SEMI International Standards
| Standards Locale: North America |
| Committee: Liquid Chemicals |
| Place of Meeting: SEMI Headquarters, Milpitas, California/USA |
| Date of Meeting: 04/05/2023 |
| Meeting End Date: 04/05/2023 |
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| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 04/19/2023 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| Chemical Mechanical Planarization Consumables (CMP-C) TF | Alexander Tregub (Intel) | Alexander Tregub (Consultant)
Michael Mills (DuPont) [New] |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 6715 | New Standard, Guide for Measuring Particle Precursors in Ultrapure Water | Passed, with technical changes. Ratification Ballot to be issued. |  6715_ProceduralReview.pdf |
| 6828C | Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems | Failed | |
| 7007 | Reapproval of SEMI C21-0618, Specification and Guide for Ammonium Hydroxide | Failed | |
| 7008 | Reapproval of SEMI C28-0618, Specification and Guide for Hydrofluoric Acid | Failed | |
| 7009 | Reapproval of SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) | Failed | |
| 7010 | Reapproval of SEMI C35-0118, Specification and Guide for Nitric Acid | Failed | |
| 7011 | Reapproval of SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% Solution | Failed | |
| 7012 | Reapproval of SEMI C41-0618, Specification and Guide for 2-Propanol | Failed | |
| 7013 | Reapproval of SEMI C45-05185, Specification and Guide for Tetraethylorthosilicate (TEOS) | Failed | |
| 7014 | Reapproval of SEMI C62-0309 (Reapproved 0618), Specification for Progen Precursors Used in Low K CVD Processes | Failed | |
| 7015 | Reapproval of SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes | Failed | |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 7006 | SNARF | High Purity Polymer Materials and Components TF | Revision to SEMI C69-1015 (Reapproved 1220), Test Method for the Determination of Surface Areas of Polymer Pellets
– TC Member Review took place between 12/07/2022-12/20/2022
– Approved by GCS on 01/10/2023 |
Authorized Activities
Listing of all revised or new SNARF(s) approved by the Originating TC Chapter.
# | Type | SC/TF/WG | Details |
| 7086 | SNARF | Ultra Pure Water TF | Revision to SEMI F61–0521, Guide for Design and Operation of a Semiconductor Ultrapure Water System |
| 7087 | SNARF | Ultra Pure Water TF | Revision to SEMI F63-0521, Guide for Ultrapure Water Used in Semiconductor Processing |
| 7088 | SNARF | Ultra Pure Water TF | Revision to SEMI F75-0521, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing |
| 7089 | SNARF | High Purity Polymer Materials and Components TF | Line-item revision to SEMI C78-0113 (RA 1218), Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy |
| 7090 | SNARF | High Purity Polymer Materials and Components TF | Line-Item Revision to SEMI C87-0515, Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry |
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| 6315C | Cycle 4, or 5-2023 | Chemical Analytical Methods TF | Revision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide |
| 6388B | Cycle 4, or 5-2023 | Chemical Analytical Methods TF | Revision to SEMI C44-0618, Specification and Guide for Sulfuric Acid |
| 6713 | Cycle 4, or 5-2023 | High Purity Polymer Materials and Components TF | Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems |
| 6828D | Cycle 5-2023 | High Purity Liquid Assemblies & Systems TF | Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems |
| 6917 | Cycle 5-2023 | High Purity Liquid Assemblies & Systems TF | Revision to SEMI F39-0621, Guide for Chemical Blending Systems |
| 6993 | Cycle 4, or 5-2023 | Water Management TF | Line-Item Revision to SEMI F98-0618, Guide for Water Reuse in Semiconductor Industry |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Abolished
# | TF | Title |
| 7007 | Chemical Analytical Methods TF | Reapproval of SEMI C21-0618, Specification and Guide for Ammonium Hydroxide [Revision SNARF to be issued] |
| 7008 | Chemical Analytical Methods TF | Reapproval of SEMI C28-0618, Specification and Guide for Hydrofluoric Acid
[Revision SNARF to be issued] |
| 7009 | Chemical Analytical Methods TF | Reapproval of SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)
[Revision SNARF to be issued] |
| 7010 | Chemical Analytical Methods TF | Reapproval of SEMI C35-0118, Specification and Guide for Nitric Acid
[Revision SNARF to be issued] |
| 7011 | Chemical Analytical Methods TF | Reapproval of SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% Solution
[Revision SNARF to be issued] |
| 7012 | Chemical Analytical Methods TF | Reapproval of SEMI C41-0618, Specification and Guide for 2-Propanol
[Revision SNARF to be issued] |
| 7013 | Chemical Analytical Methods TF | Reapproval of SEMI C45-05185, Specification and Guide for Tetraethylorthosilicate (TEOS) [Revision SNARF to be issued] |
| 7014 | Chemical Analytical Methods TF | Reapproval of SEMI C62-0309 (Reapproved 0618), Specification for Progen Precursors Used in Low K CVD Processe
[Revision SNARF to be issued] |
| 7015 | Chemical Analytical Methods TF | Reapproval of SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes
[Revision SNARF to be issued] |
| 7016 | Chemical Analytical Methods TF | Reapproval of SEMI C81-0113 (Reapproved 0618), Guide for Tris(Dimethylamino) Silane (3DMAS)
[SNARF Abandoned] |
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for the week of July 10-13, in conjunction with SEMICON West 2023. Schedule details TBD. Please check www.semi.org/standards for updates.
Tentative Schedule:
·Monday, July 10
·Tuesday, July 11
o 9:00-10:00, UPW TF
o 10:00-11:00, Water Management TF
o 11:00-12:00, High Purity Polymer Material & Components TF
o ?? 13:00-14:00 Statistical Methods TF
o 14:00-16:00 Liquid Chemicals NA TC Chapter Meeting – Day 1
·Wednesday, July 12
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting – Day 2
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