SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: SEMI HQ, Milpitas, CA
Date of Meeting: 04/06/2023
Meeting End Date: 04/06/2023
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 04/13/2023


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
S6 Revision TFGlenn Holbrook (ASM)Glenn Holbrook (ASM)
Eric Sklar (Safety Guru)


Committee Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Change
S2 Interlock TFDisbanded
S2 Major Revision TF (new)


Ballot Results

Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
6940ALine Item Revisions to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Mention of SEMI S18 and the Invocation of SEMI S30)6940A AR.pdf6940A AR.pdf
Line Item 1 - Add Delayed Revision Section X to SEMI S02-0821Passed as balloted
Line Item 2 - Add Delayed Revision Section Y to SEMI S02-0821Passed as balloted
6944ALine Item Revisions to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Fire Protection)6944A AR.pdf6944A AR.pdf
Line Item 1 - Add Delayed Revision Section X to SEMI S02-0821Passed as balloted
Line Item 2 - Add Delayed Revision Section Y to SEMI S02-0821Passed as balloted
6831CRevision to SEMI S1-1015 Safety Guideline for Equipment Safety LabelsPassed with technical changes. Ratification ballot will be issued.6831C A&R.pdf6831C A&R.pdf
6941ALine Item Revision to SEMI S30-0719E, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (regarding heating of piping)
Line Item 1 - Modify sections 5, 8 and 17.3.3.Failed and returned to TF for rework and reballot
Line Item 2 - Adding, as 17.8.8, criteria specific to managing the risks of loss of heating downstream of process chambers.Failed and returned to TF for rework and reballot


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
7021SNARFS2/S22 Revision TFLine Items Revisions of S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
7022SNARFEnergetic Materials EHS TFLine Item Revision to SEMI S30, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (energetic materials)
7023SNARFS6 Revision TFReapproval of S6, Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment


Authorized Ballots

#
When
TF
Details
R6831CCycle 4 or 5-2023S1 Revision TFRatification Ballot - Revision of SEMI S1-1015, Safety Guideline for Equipment Safety Labels
6884ACycle 4 or 5-2023S2 Mechanical TFLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Mechanical)
6907Cycle 4 or 5-2023S7 Revision TFRevision to SEMI S7, Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications
6981Cycle 4 or 5-2023Ergonomics TFLine Item Revisions to SEMI S8-0218, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
7021Cycle 4 or 5-202S2/S22 Revision TFLine Items Revisions of S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
7022Cycle 4 or 5-202Energetic Materials EHS TFLine Item Revision to SEMI S30, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (energetic materials)
7023Cycle 4 or 5-202S6 Revision TFReapproval of S6, Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Abolished

#
TF
Title
6941Energetic Materials EHS TFLine Item Revision to SEMI S30-0719E, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (Regarding heating of piping)


Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
July 13, 2023 9 AM - 3 PM Pacific in conjunction with SEMICON West. Check www.semi.org/standards for the latest information.