SEMI International Standards
| Standards Locale: North America |
| Committee: EHS |
| Place of Meeting: SEMI HQ, Milpitas, CA |
| Date of Meeting: 04/06/2023 |
| Meeting End Date: 04/06/2023 |
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| Recording SEMI Standards Staff: Kevin Nguyen |
| CER Posted to Web: 04/13/2023 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| S6 Revision TF | Glenn Holbrook (ASM) | Glenn Holbrook (ASM)
Eric Sklar (Safety Guru) |
Committee Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Change |
| S2 Interlock TF | Disbanded |
| S2 Major Revision TF (new) |
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 6940A | Line Item Revisions to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Mention of SEMI S18 and the Invocation of SEMI S30) | |  6940A AR.pdf |
| Line Item 1 - Add Delayed Revision Section X to SEMI S02-0821 | Passed as balloted | |
| Line Item 2 - Add Delayed Revision Section Y to SEMI S02-0821 | Passed as balloted | |
| 6944A | Line Item Revisions to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Fire Protection) | |  6944A AR.pdf |
| Line Item 1 - Add Delayed Revision Section X to SEMI S02-0821 | Passed as balloted | |
| Line Item 2 - Add Delayed Revision Section Y to SEMI S02-0821 | Passed as balloted | |
| 6831C | Revision to SEMI S1-1015 Safety Guideline for Equipment Safety Labels | Passed with technical changes. Ratification ballot will be issued. |  6831C A&R.pdf |
| 6941A | Line Item Revision to SEMI S30-0719E, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (regarding heating of piping) | | |
| Line Item 1 - Modify sections 5, 8 and 17.3.3. | Failed and returned to TF for rework and reballot | |
| Line Item 2 - Adding, as ¶17.8.8, criteria specific to managing the risks of loss of heating downstream of process chambers. | Failed and returned to TF for rework and reballot | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 7021 | SNARF | S2/S22 Revision TF | Line Items Revisions of S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment |
| 7022 | SNARF | Energetic Materials EHS TF | Line Item Revision to SEMI S30, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (energetic materials) |
| 7023 | SNARF | S6 Revision TF | Reapproval of S6, Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment |
Authorized Ballots
# | When | TF | Details |
| R6831C | Cycle 4 or 5-2023 | S1 Revision TF | Ratification Ballot - Revision of SEMI S1-1015, Safety Guideline for Equipment Safety Labels |
| 6884A | Cycle 4 or 5-2023 | S2 Mechanical TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Mechanical) |
| 6907 | Cycle 4 or 5-2023 | S7 Revision TF | Revision to SEMI S7, Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications |
| 6981 | Cycle 4 or 5-2023 | Ergonomics TF | Line Item Revisions to SEMI S8-0218, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| 7021 | Cycle 4 or 5-202 | S2/S22 Revision TF | Line Items Revisions of S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment |
| 7022 | Cycle 4 or 5-202 | Energetic Materials EHS TF | Line Item Revision to SEMI S30, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (energetic materials) |
| 7023 | Cycle 4 or 5-202 | S6 Revision TF | Reapproval of S6, Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Abolished
# | TF | Title |
| 6941 | Energetic Materials EHS TF | Line Item Revision to SEMI S30-0719E, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (Regarding heating of piping) |
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
July 13, 2023 9 AM - 3 PM Pacific in conjunction with SEMICON West. Check www.semi.org/standards for the latest information.
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