SEMI International Standards
| Standards Locale: North America |
| Committee: Facilities & Gases |
| Place of Meeting: SEMI Headquarters, Milpitas, California/USA |
| Date of Meeting: 11/07/2023 |
| Meeting End Date: 11/07/2023 |
 |
| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 12/07/2023 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| Facilities |
| None | | |
| Gases |
| Materials of Construction of Gas Delivery Systems Task Force | Bill Kiikvee (AP Tech) [stepped down] | Max van den Berg (Festo) [New]
Matt Milburn (UCT) |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action#1,2 | A&R Forms for Approved Ballots |
| Facilities |
| None | | | |
| Gases |
| 6916 | Replacement of SEMI F109-0212, Guide for Heater Systems Requirements, as a New Standard: Guide for Material Selection for Heater Systems | Failed | |
| 7097 | Line-Item Revision to SEMI C54-1116, Specification for Oxygen | |  7097_ProceduralReview.pdf |
| L1 | Add chemical formula for oxygen in title. | Passed, with editorial changes. | |
| L2 | Update throughout to comply to Regs, PM and SM. | Passed, Ratification Ballot to be issued. | |
| L3 | Clarify word usage and SI units in §9 through § 10 per SM. | Passed, with editorial changes. | |
| L4 | Change “is to”, “may”, “must”, or “should” to “shall” or “should” throughout, where appropriate. | Passed, Ratification Ballot to be issued. | |
| 7098 | Line-Item Revision to SEMI C56-1116, Specification for Dichlorosilane | |  7098_ProceduralReview.pdf |
| L1 | Add chemical formula for dichlorosilane in title. | Passed, with editorial changes. | |
| L2 | Update throughout to comply to Regs, PM and SM. | Passed, with editorial changes. | |
| 7151 | Line-Item Revision to SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak Rates | |  7151_ProceduralReview.pdf |
| L1 | Update throughout to comply to Regs, PM and SM. | Passed, as balloted. | |
| L2 | Change “must” or “shall” to “should” throughout. | Passed, Ratification Ballot to be issued. | |
| 7152 | Line-Item Revision to SEMI E27-1017, Guide for Mass Flow Controller and Mass Flow Meter Linearity | |  7152_ProceduralReview.pdf |
| L1 | Update throughout to comply to Regs, PM and SM. | Passed, as balloted. | |
#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
#2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
Document # | Document Title | ISC A&R Action#1,2 | A&R Forms |
| Facilities |
| None | | | |
| Gases |
| R7092 | Line-Item Revision to SEMI E29-1110 (Reapproved 0417), Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters | Passed |  R7092_ProceduralReview.pdf |
#1: Passed Ratification ballots will be submitted to SEMI publication for final processing.
#2: Failed Ratification ballots were returned to the originating task forces for re-work and re-balloting or abandoning.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| Facilities |
| None | | | |
| Gases |
| 7051 | SNARF/
Ballot Authorization | Mass Flow Controller TF | Line-Item Revision to SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak Rates
– Approved by GCS on 09/15/2023 |
| 7052 | SNARF/
Ballot Authorization | Mass Flow Controller TF | Line-Item Revision to SEMI E27-1017, Guide for Mass Flow Controller and Mass Flow Meter Linearity
– Approved by GCS on 09/15/2023 |
| 7053 | SNARF/
Ballot Authorization | Mass Flow Controller TF | Line-Item Revision to SEMI E66-0611 (Reapproved 0517), Test Method for Determining Particle Contribution by Mass Flow Controllers
– Approved by GCS on 09/15/2023 |
Authorized Activities
Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter.
# | Type#1 | SC/TF/WG | Details |
| Facilities |
| 7196 | SNARF | Voltage Sag Immunity TF | Revision to SEMI F47-0706 (Reapproved 0812), Specification for Semiconductor Processing Equipment Voltage Sag Immunity |
| Gases |
- | TFOF | Materials of Construction of Gas Delivery Systems TF | Appoint new co-leader: Max van den Berg (Festo). Bill Kiikvee (AP Tech) stepped down. |
| 7197 | SNARFs | Filters & Purifiers TF | Line-Item Revision to SEMI F28, Test Method for Measuring Particle Generation from Process Panels |
| 7198 | SNARFs | Filters & Purifiers TF | Line-Item Revision to SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters |
| 7199 | SNARFs | Filters & Purifiers TF | Line-Item Revision to SEMI F59-0302 (Reapproved 0613), Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves |
| 7200 | SNARFs | Filters & Purifiers TF | Line-Item Revision to SEMI F67-1101 (Reapproved 0713), Test Method for Determining Inert Gas Purifier Capacity |
| 7201 | SNARFs | Filters & Purifiers TF | Line-Item Revision to SEMI F68-1101 (Reapproved 0713), Test Method for Determining Purifier Efficiency |
| 7202 | SNARFs | Materials of Construction of Gas Delivery Systems TF | Line-Item Revision to SEMI F69-1213E, Test Method for Transport and Shock Testing of Gas Delivery Systems |
| 7203 | SNARFs | Materials of Construction of Gas Delivery Systems TF | Line-Item Revision to SEMI F78-0611 (Reapproved 0917), Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications |
| 7204 | SNARFs | Materials of Construction of Gas Delivery Systems TF | Line-Item Revision to SEMI F81-0611 (Reapproved 0917),
Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications |
#1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| Facilities |
| None | | | |
| Gases |
| 6916A | Cycle 9-23, 1 or 2-2024 | Heater Jacket TF | Replacement of SEMI F109-0212, Guide for Heater Systems Requirements,
as a New Standard: Guide for Material Selection for Heater Systems |
| 7197 | Cycle 9-23, 1 or 2-2024 | Filters & Purifiers TF | Line-Item Revision to SEMI F28, Test Method for Measuring Particle Generation from Process Panels |
| 7198 | Cycle 9-23, 1 or 2-2024 | Filters & Purifiers TF | Line-Item Revision to SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters |
| 7199 | Cycle 9-23, 1 or 2-2024 | Filters & Purifiers TF | Line-Item Revision to SEMI F59-0302 (Reapproved 0613), Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves |
| 7200 | Cycle 9-23, 1 or 2-2024 | Filters & Purifiers TF | Line-Item Revision to SEMI F67-1101 (Reapproved 0713), Test Method for Determining Inert Gas Purifier Capacity |
| 7201 | Cycle 9-23, 1 or 2-2024 | Filters & Purifiers TF | Line-Item Revision to SEMI F68-1101 (Reapproved 0713), Test Method for Determining Purifier Efficiency |
| 7202 | Cycle 9-23, 1 or 2-2024 | Materials of Construction of Gas Delivery Systems TF | Line-Item Revision to SEMI F69-1213E, Test Method for Transport and Shock Testing of Gas Delivery Systems |
| 7203 | Cycle 9-23, 1 or 2-2024 | Materials of Construction of Gas Delivery Systems TF | Line-Item Revision to SEMI F78-0611 (Reapproved 0917), Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications |
| 7204 | Cycle 9-23, 1 or 2-2024 | Materials of Construction of Gas Delivery Systems TF | Line-Item Revision to SEMI F81-0611 (Reapproved 0917),
Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for the week of March 25-28, in conjunction with NA Standards Spring Meetings 2024. Schedule details TBD. Please check www.semi.org/standards for updates.
Facilities and Gases Task Forces typically meet on Monday, and the TC Chapter meets on Tuesday
Tentative Schedule
· Monday, March 25
o 9:00-10:00, Materials of Construction of Gas Delivery Systems
o 10:00-11:00, Filters & Purifiers
o 11:00-12:00 Noon, Mass Flow Controller
o 13:00-14:00, Gases Specification
o 14:00-15:00, Heater Jacket
o 13:00-14:00, Voltage Sag Immunity TF
o 15:00-16:00, BIM TF
· Tuesday, March 26
9:00-12:00 Noon, Facilities & Gases NA TC Chapter
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