SEMI International Standards
| Standards Locale: Japan |
| Committee: Metrics |
| Place of Meeting: SEMI Japan office, Tokyo |
| Date of Meeting: 06/28/2019 |
| Meeting End Date: 06/28/2019 |
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| Recording SEMI Standards Staff: Chie Yanagisawa |
| CER Posted to Web: 07/17/2019 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all revised or new SNARF(s) approved by the Originating TC Chapter.
# | Type | SC/TF/WG | Details |
| TBD | SNARF | RF Measurement liaison TF | Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems |
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| TBD | Cycle 7/8-2019 | RF Measurement liaison TF | Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled as follows.
· Date: Thursday, December 12, 2019, 14:00-17:00
· Place: Tokyo Big Sight, Tokyo, Japan
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