SEMI International Standards
Standards Locale: Japan
Committee: Liquid Chemicals
Place of Meeting: SEMI Japan Office, Tokyo
Date of Meeting: 08/20/2020
Meeting End Date: 08/20/2020
Recording SEMI Standards Staff: Hirofumi Kanno
CER Posted to Web: 09/02/2020


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6575Line Item Revision to SEMI F61-0617, Guide to Design and Operation of a Semiconductor Ultrapure Water System--6575_Ballot Line-Item report template_r2.pdf6575_Ballot Line-Item report template_r2.pdf
Line Item 1SEMI F61 - Update Sections 10 and 17 and Appendices 1 and 7 to align with 2019 IRDSFailed--
6576Line Item Revision to SEMI F63-0918, Guide for Ultrapure Water Used in Semiconductor Processing--6576_Ballot Line-Item report template_r2.pdf6576_Ballot Line-Item report template_r2.pdf
Line Item 1SEMI F63 - Provide clarification to limitations and Table 2Failed--
Line Item 2SEMI F63 - Update Table 1, including corresponding footnotes and text, to align with 2019 IRDS while also providing achievable limits with available metrologyFailed--
6577Line Item Revision to SEMI F75-0617, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing--6577_Ballot Line-Item report template_r2.pdf6577_Ballot Line-Item report template_r2.pdf
Line Item 1SEMI F75 - Update Sections 5 and 8 to align with 2019 IRDS, while also providing achievable limits with available metrologyFailed--
6606Reapproval to SEMI C69-1015, Test Method for the Determination of Surface Areas of Polymer PelletsPassed6606_Ballot Report Template_r2.pdf6606_Ballot Report Template_r2.pdf
6489New Standard: Guide for Reporting Chemical Mechanical Planarization (CMP) Polishing Pad Hardness used in Semiconductor ManufacturingPassed　with editorial change6489_Ballot Report Template_r2.pdf6489_Ballot Report Template_r2.pdf
6645Revision to SEMI F40-0699E (Reapproved 0918), Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing, with title change to: Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers or Chemical TestingFailed6645_Ballot Report Template_r2.pdf6645_Ballot Report Template_r2.pdf
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
Friday January 29, 2021 13:00-15:00 at SEMI Japan Office, Tokyo Japan