SEMI International Standards
Standards Locale: North America |
Committee: Facilities & Gases |
Place of Meeting: Moscone Center, San Francisco, California/USA |
Date of Meeting: 07/09/2019 |
Meeting End Date: 07/09/2019 |
|
Recording SEMI Standards Staff: Laura Nguyen |
CER Posted to Web: 07/22/2019 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
Facilities |
None | | |
Gases |
Mass Flow Controller TF | Erica Kitano/Fujikin (Stepped down) | Open |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
Facilities |
None | | | |
Gases |
R6340C | Revision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow Controllers | Passed, submitted to ISC A&R for approval | R6340C_Ballot Review.pdf |
6512 | Reapproval of SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers | Failed | |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
Listing of documents authorized by the TC Chapter for Letter Ballot.
# | When | TF | Details |
Facilities |
None | | | |
Gases |
6290C | Cycle 6 or 7-2019 | Filters & Purifiers TF | New Standard: Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components |
6291C | Cycle 6 or 7-2019 | Filters & Purifiers TF | New Standard: Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components |
6394 | Cycle 6 or 7-2019 | Materials of Construction of Gas Delivery Systems TF | Line Item Revision to SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems |
6441A | Cycle 6 or 7-2019 | Filters & Purifiers TF | Revision to add a New Subordinate Standard, Test Method for Determination of Particle Contribution of Gas Delivery System and its Components through Dynamic (Pulse) Testing, to SEMI F70-0611 (Reapproved 0517), Test Method for Determination of Particle Contribution of Gas Delivery System |
6457 | Cycle 6 or 7-2019 | Filters & Purifiers TF | Revision to SEMI F38-0699, Test Method for Efficiency Qualification of Point-of-Use Gas Filters |
6477 | Cycle 6 or 7-2019 | Filters & Purifiers TF | Revision to SEMI F112-0613 Test Method for Determination of Moisture Dry Down Characteristics of Surface Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS) |
6492A | Cycle 6 or 7-2019 | Gases Specification TF | Line Item Revision to SEMI C3.32-0614, Specification for Chlorine (Cl2), 99.996% Quality |
6493A | Cycle 6 or 7-2019 | Gases Specification TF | Line Item Revision to SEMI C3.37-0614, Specification for Hexafluoroethane (C2F6), 99.97% Quality |
6510 | Cycle 6 or 7-2019 | Materials of Construction of Gas Delivery Systems TF | Line Item to SEMI F32-0211, Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is scheduled for Tuesday, November 5, in conjunction with the NA Standards Fall 2019 Meetings at SEMI Headquarters in Milpitas, California. For more information, please visit the Standards Calendar at http://www.semi.org/standards.
Tentative Schedule:
Monday, November 4
Gases Task Force Meetings
09:00-10:00 Materials of Construction of Gas Delivery Systems (TF)
10:00-11:00 Filters and Purifiers (TF)
11:00-12:00 Mass Flow Controller (TF)
13:00-14:00 Gas Specification (TF)
13:00-14:00 Heater Jacket (TF)
Facilities Task Force Meetings
(not meeting) Building Information Modeling (BIM) for Semiconductor Capital Equipment (TF)
(not meeting) Voltage Sag Immunity (TF)
Tuesday, November 5
09:00-12:00 Facilities & Gases (C)
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