SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: Moscone Center, San Francisco, California/USA
Date of Meeting: 07/09/2019
Meeting End Date: 07/09/2019
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 07/22/2019


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Facilities
None
Gases
Mass Flow Controller TFErica Kitano/Fujikin (Stepped down)Open


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
Facilities
None
Gases
R6340CRevision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow ControllersPassed, submitted to ISC A&R for approvalR6340C_Ballot Review.pdfR6340C_Ballot Review.pdf
6512Reapproval of SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow ControllersFailed
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2:
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
Listing of documents authorized by the TC Chapter for Letter Ballot.
#
When
TF
Details
Facilities
None
Gases
6290CCycle 6 or 7-2019Filters & Purifiers TFNew Standard: Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components
6291CCycle 6 or 7-2019Filters & Purifiers TFNew Standard: Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components
6394Cycle 6 or 7-2019Materials of Construction of Gas Delivery Systems TFLine Item Revision to SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems
6441ACycle 6 or 7-2019Filters & Purifiers TFRevision to add a New Subordinate Standard, Test Method for Determination of Particle Contribution of Gas Delivery System and its Components through Dynamic (Pulse) Testing, to SEMI F70-0611 (Reapproved 0517), Test Method for Determination of Particle Contribution of Gas Delivery System
6457Cycle 6 or 7-2019Filters & Purifiers TFRevision to SEMI F38-0699, Test Method for Efficiency Qualification of Point-of-Use Gas Filters
6477Cycle 6 or 7-2019Filters & Purifiers TFRevision to SEMI F112-0613 Test Method for Determination of Moisture Dry Down Characteristics of Surface Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)
6492ACycle 6 or 7-2019Gases Specification TFLine Item Revision to SEMI C3.32-0614, Specification for Chlorine (Cl2), 99.996% Quality
6493ACycle 6 or 7-2019Gases Specification TFLine Item Revision to SEMI C3.37-0614, Specification for Hexafluoroethane (C2F6), 99.97% Quality
6510Cycle 6 or 7-2019Materials of Construction of Gas Delivery Systems TFLine Item to SEMI F32-0211, Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting is scheduled for Tuesday, November 5, in conjunction with the NA Standards Fall 2019 Meetings at SEMI Headquarters in Milpitas, California. For more information, please visit the Standards Calendar at http://www.semi.org/standards.

Tentative Schedule:

        Monday, November 4
        Gases Task Force Meetings
            09:00-10:00 Materials of Construction of Gas Delivery Systems (TF)
            10:00-11:00 Filters and Purifiers (TF)
            11:00-12:00 Mass Flow Controller (TF)
            13:00-14:00 Gas Specification (TF)
            13:00-14:00 Heater Jacket (TF)
        Facilities Task Force Meetings
            (not meeting) Building Information Modeling (BIM) for Semiconductor Capital Equipment (TF)
            (not meeting) Voltage Sag Immunity (TF)
        Tuesday, November 5
            09:00-12:00 Facilities & Gases (C)