SEMI International Standards
| Standards Locale: North America |
| Committee: EHS |
| Place of Meeting: SEMI HQ, Milpitas, CA |
| Date of Meeting: 11/09/2023 |
| Meeting End Date: 11/09/2023 |
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| Recording SEMI Standards Staff: Kevin Nguyen |
| CER Posted to Web: 11/17/2023 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| EPR TF | Ben Gross (Applied Materials) | Ben Gross (Applied Materials)
Andreas Kloeppel (Applied Materials) |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action#1,#2 | A&R Forms for Approved Ballots |
| 6884B | Line Item Revision to SEMI S2-0821Eb, Environmental, Health, And Safety Guideline For Semiconductor Manufacturing Equipment | Refer below | |
| Line Item 1 - Delayed Revisions related to lifting equipment and hinged loads (§§ 5.2, 18.6, and 18.7) | Failed and returned to TF for rework and reballot | |
| 7108 | Line Item Revision to SEMI S2-0821Eb Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revision Related to Safety Labels) | Refer below | |
| Line Item 1 - Delayed Revision Related to Safety Labels | Failed and returned to TF for rework and reballot | |
| 7109 | Line Item Revisions to
- SEMI S1-0923, Safety Guideline for Equipment Safety Labels
- SEMI S2-0821Eb, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and
- SEMI S30 -0719E Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes
| Refer below | |
| Line Item 1 - Delayed Revisions Related to Risk | Passed as balloted |  7109 A&R.pdf |
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Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 7134 | SNARF | Ergonomics TF | Revision to SEMI S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| 7135 | SNARF | S23 Global TF | Revision to SEMI S23, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment |
| 7133 | SNARF | S6 Revision TF | Revision of SEMI S6, Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment |
Authorized Activities
# | Type | SC/TF/WG | Details |
| 7158 | SNARF | S2 Mechanical TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Section 5 and 18) |
| 7159 | SNARF | EHS Committee | Reapproval of SEMI S25-0319, Safety Guideline for Hydrogen Peroxide Storage & Handling Systems |
Authorized Ballots
# | When | TF | Details |
| 6830 | Cycle 9-23, 1-24 or 2-24 | S3 Revision TF | Revision to SEMI S3-1211 (Reapproved 1017)E Safety Guideline For Process Liquid Heating Systems |
| 7158 | Cycle 9-23, 1-24 or 2-24 | S2 Mechanical TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Mechanical) |
| 6907 | Cycle 9-23, 1-24 or 2-24 | S7 Revision TF | Revision to SEMI S7, Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications |
| 6980 | Cycle 9-23, 1-24 or 2-24 | Flammable Gas Task Force | Line Item Revisions to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re:Flammable gas) |
| 7021 | Cycle 9-23, 1-24 or 2-24 | S2/S22 Revision TF | Line Items Revisions of S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment |
| 7108A | Cycle 9-23, 1-24 or 2-24 | S1 Revision TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (labels) |
| 7134 | Cycle 9-23, 1-24 or 2-24 | Ergonomics TF | Revision to SEMI S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| 7135 | Cycle 9-23, 1-24 or 2-24 | S23 Global TF | Revision to SEMI S23, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment |
| 7159 | Cycle 9-23, 1-24 or 2-24 | EHS Committee | Reapproval of SEMI S25-0319, Safety Guideline for Hydrogen Peroxide Storage & Handling Systems |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
March 28, 2024 9 AM - 3 PM Pacific at SEMI HQ, Milpitas, CA in conjunction with NA Spring 2024 meeting. Check www.semi.org/standards for the latest update.
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