SEMI International Standards
| Standards Locale: Japan |
| Committee: Metrics |
| Place of Meeting: Tokyo Big Sight / OVTCCM |
| Date of Meeting: 12/13/2023 |
| Meeting End Date: 12/13/2023 |
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| Recording SEMI Standards Staff: Mami Nakajo |
| CER Posted to Web: 01/12/2024 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 6550A | Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems | Passed with editorial changes |  6550A.pdf |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Date, time, location, event: Friday July 26, 15:00-17:00 [JST] via OVTCCM (Hybrid)
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