SEMI International Standards
| Standards Locale: North America |
| Committee: Liquid Chemicals |
| Place of Meeting: Moscone Center, San Francisco, CA |
| Date of Meeting: 07/09/2019 |
| Meeting End Date: 07/09/2019 |
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| Recording SEMI Standards Staff: Inna Skvortsova |
| CER Posted to Web: 07/18/2019 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
6085A | Revision to SEMI F57- 0314, Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems. | Passed with editorial changes |  6085A_Ballot Review.pdf |
6195 | Revision to SEMI F104-0312, Particle Test Method for Evaluation of Components Used in UPW and Liquid Chemicals Distribution Systems, with title change. | Failed | |
6488 | New Standard: Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting used in Semiconductor Manufacturing | Passed |  6488_Ballot Review.pdf |
6530 | Reapproval to SEMI C19-0514, Specification for Acetone | Passed with editorial changes |  6530_Ballot Review.pdf |
6528 | Reapproval to SEMI C51-0114, Specification for Xylenes | Passed |  6528_Ballot Review.pdf |
6531 | Reapproval to SEMI C84-0214, Guide for Cyclopentanone | Passed |  6531_Ballot Review.pdf |
6529 | Reapproval to SEMI C85-0214, Guide for Methyl Isobutyl Carbinol (MIBC) | Passed |  6529_Ballot Review.pdf |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| TBD | SNARF | HPPM&C | Line Item Revision to SEMI F40-0699E (Reapproved 0918): Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
New SNARF approved at TC meeting |
| TBD | SNARF | HPPM&C | New Standard: Guide to Meet IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
New SNARF to be distributed for 2-week member review followed by GCS approval |
| TBD | SNARF | CAM TF | New Standard: Test Method for Determining pH of Chemical Mechanical Planarization (CMP) Slurries and Related Chemicals
New SNARF to be distributed for 2-week member review followed by GCS approval |
| TBD | SNARF | CAM TF | Reapproval to SEMI C18-0714: Specification for Acetic Acid
New SNARF approved at TC meeting |
| TBD | SNARF | CAM TF | Reapproval to SEMI C23-0714: Specifications for Buffered Oxide Etchants
New SNARF approved at TC meeting |
.
Authorized Ballots
# | When | TF | Details |
| 6195A | Cycle 7-2019 | HPPM&C | Revision to SEMI F104-0312, Particle Test Method for Evaluation of Components Used in UPW and Liquid Chemicals Distribution Systems, with title change. |
| 6433 | Cycle 7-2019 | CAM TF | New Standard: Test Method for Determining Conductivity of Chemical Mechanical Polish (CMP) Slurries and Related Chemicals |
| TBD | Cycle 7-2019 | CAM TF | Reapproval to SEMI C18-0714: Specification for Acetic Acid |
| TBD | Cycle 7-2019 | CAM TF | Reapproval to SEMI C23-0714: Specifications for Buffered Oxide Etchants |
| 6490 | Cycle 7-2019 | UPW TF | Revision to SEMI C93- 0217, Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
Next Meeting
Next Meeting - Standards Fall 2019 Meetings <tentative schedule>
Monday, November 4, 2019; SEMI HQ Milpitas, CA
Tuesday, November 5, 2019; SEMI HQ Milpitas, CA
· UPW Task Force (8AM – 9:30AM)
· High Purity Polymer Materials & Components (9:30AM – 11AM)
· Liquid Chemicals TC Chapter (2:00PM – 5:00PM)
For more information, please visit Standards Calendar at http://www.semi.org/en/standards.
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