SEMI International Standards
| Standards Locale: North America |
| Committee: Liquid Chemicals |
| Place of Meeting: Moscone Center, San Francisco, California/USA |
| Date of Meeting: 07/11/2023 |
| Meeting End Date: 07/12/2023 |
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| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 07/28/2023 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| Ultra Pure Water Task Force | Bonnie Marion (FTD Solutions) [stepped down]
Gary van Schooneveld (CT Associates)
Bob McIntosh (GF Piping) | Lindsey Sullivan (FTD Solutions) [New]
Gary van Schooneveld (CT Associates)
Bob McIntosh (GF Piping) |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action#1,2 | A&R Forms for Approved Ballots |
| 6315C | Revision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide | Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued. |  6315C_ProceduralReview.pdf |
| 6388B | Revision to SEMI C44-0618, Specification and Guide for Sulfuric Acid | Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued. |  6388B_ProceduralReview.pdf |
| 6715A | New Standard: Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water | Passed, with editorial changes. |  6715A_ProceduralReview.pdf |
| 6917 | Revision to SEMI F39-0621, Guide for Chemical Blending Systems | Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued. |  6917_ProceduralReview.pdf |
| 6993 | Line-Item Revision to SEMI F98-0521, Guide for Water Reuse in Semiconductor Industry | Passed, with editorial changes. |  6993_ProceduralReview.pdf |
| 7091 | Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems, with title change to: Test Method and Specification for Testing of Perfluoroalkoxy (PFA) and Other Fluorinated Materials Used in Liquid Chemical Distribution Systems | Failed | |
| SEMI C93 | Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System
(PCR) | Passed, submitted to ISC A&R SC for Procedural Review. |  C93_ProceduralReview-PCR.pdf |
#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
#2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
Document # | Document Title | ISC A&R Action#1,2 | A&R Forms |
| R6715 | New Standard: Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water | Failed | |
#1: Passed Ratification ballots will be submitted to SEMI publication for final processing.
#2: Failed Ratification ballots were returned to the originating task forces for re-work and re-balloting or abandoning.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 7091 | SNARF/
Ballot Authorization | High Purity Polymer Materials & Components TF | Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems, with title change to: Test Method and Specification for Testing of Perfluoroalkoxy (PFA) and Other Fluorinated Materials Used in Liquid Chemical Distribution Systems
– Approved by GCS on 05/30/2023 |
| 6715A | SNARF/
Ballot Authorization | Ultra Pure Water TF | New Standard: Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water
– Approved by GCS on 05/30/2023 |
Authorized Activities
Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter.
# | Type#1 | SC/TF/WG | Details |
| TBD | SNARF | Chemical Analytical Methods TF | Revision to SEMI C21-0618, Specification and Guide for Ammonium Hydroxide |
| TBD | SNARF | Chemical Analytical Methods TF | Revision to SEMI C28-0618, Specification and Guide for Hydrofluoric Acid |
| TBD | SNARF | Chemical Analytical Methods TF | Revision to SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) |
| TBD | SNARF | Chemical Analytical Methods TF | Revision to SEMI C35-0118, Specification and Guide for Nitric Acid |
| TBD | SNARF | Chemical Analytical Methods TF | Revision to SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% Solution |
| TBD | SNARF | Chemical Analytical Methods TF | Revision to SEMI C41-0618, Specification and Guide for 2-Propanol |
| TBD | SNARF | Chemical Analytical Methods TF | Revision to SEMI C45-0518, Specification and Guide for Tetraethylorthosilicate (TEOS) |
| TBD | SNARF | Chemical Analytical Methods TF | Revision to SEMI C62-0309 (Reapproved 0618), Specification for Porogen Precursors Used in Low K CVD Processes |
| TBD | SNARF | Chemical Analytical Methods TF | Revision to SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes |
#1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| R6315C | Cycle 6-2023 | Chemical Analytical Methods TF | Revision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide |
| R6388B | Cycle 6-2023 | Chemical Analytical Methods TF | Revision to SEMI C44-0618, Specification and Guide for Sulfuric Acid |
| R6917 | Cycle 6-2023 | High Purity Liquid Assemblies & Systems TF | Revision to SEMI F39-0621, Guide for Chemical Blending Systems |
| 6828D | Cycle 6 or 7-2023 | High Purity Liquid Assemblies & Systems TF | Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Abolished
# | TF | Title |
| 6713 | High Purity Polymer Materials and Components TF | Line Item Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
[Abandoned SNARF bc of change in scope, new revision SNARF reissued] |
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for the week of November 6-9, in conjunction with SEMI Standards NA Fall Meetings 2023. Schedule details TBD. Please check www.semi.org/standards for updates.
Tentative Schedule:
· Monday
· Tuesday
o TBD, High Purity Liquid Assemblies & System TF
o TBD, Chemical Analytical Methods TF
o TBD, Chemical Mechanical Planarization Consumables TF
o TBD, Statistical Methods TF
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting, Day 1
· Wednesday
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting, Day 2
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