SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: Moscone Center, San Francisco, California/USA
Date of Meeting: 07/11/2023
Meeting End Date: 07/12/2023
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 07/28/2023


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Ultra Pure Water Task ForceBonnie Marion (FTD Solutions) [stepped down]
Gary van Schooneveld (CT Associates)
Bob McIntosh (GF Piping)
Lindsey Sullivan (FTD Solutions) [New]
Gary van Schooneveld (CT Associates)
Bob McIntosh (GF Piping)


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
TC Chapter Action#1,2
A&R Forms for Approved Ballots
6315CRevision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen PeroxidePassed, with technical changes and with or without editorial changes; Ratification Ballot to be issued.6315C_ProceduralReview.pdf6315C_ProceduralReview.pdf
6388BRevision to SEMI C44-0618, Specification and Guide for Sulfuric AcidPassed, with technical changes and with or without editorial changes; Ratification Ballot to be issued.6388B_ProceduralReview.pdf6388B_ProceduralReview.pdf
6715ANew Standard: Guide for Evaluating Metrology for Particle Precursors in Ultrapure WaterPassed, with editorial changes.6715A_ProceduralReview.pdf6715A_ProceduralReview.pdf
6917Revision to SEMI F39-0621, Guide for Chemical Blending SystemsPassed, with technical changes and with or without editorial changes; Ratification Ballot to be issued.6917_ProceduralReview.pdf6917_ProceduralReview.pdf
6993Line-Item Revision to SEMI F98-0521, Guide for Water Reuse in Semiconductor IndustryPassed, with editorial changes.6993_ProceduralReview.pdf6993_ProceduralReview.pdf
7091Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems, with title change to: Test Method and Specification for Testing of Perfluoroalkoxy (PFA) and Other Fluorinated Materials Used in Liquid Chemical Distribution SystemsFailed
SEMI C93Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System
(PCR)
Passed, submitted to ISC A&R SC for Procedural Review.C93_ProceduralReview-PCR.pdfC93_ProceduralReview-PCR.pdf
#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
#2:
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results

Document #
Document Title
ISC A&R Action#1,2
A&R Forms
R6715New Standard: Guide for Evaluating Metrology for Particle Precursors in Ultrapure WaterFailed
#1: Passed Ratification ballots will be submitted to SEMI publication for final processing.
#2:
Failed Ratification ballots were returned to the originating task forces for re-work and re-balloting or abandoning.


Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
7091SNARF/
Ballot Authorization
High Purity Polymer Materials & Components TFRevision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems, with title change to: Test Method and Specification for Testing of Perfluoroalkoxy (PFA) and Other Fluorinated Materials Used in Liquid Chemical Distribution Systems
– Approved by GCS on 05/30/2023
6715ASNARF/
Ballot Authorization
Ultra Pure Water TFNew Standard: Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water
– Approved by GCS on 05/30/2023


Authorized Activities
Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter.
#
Type#1
SC/TF/WG
Details
TBDSNARFChemical Analytical Methods TFRevision to SEMI C21-0618, Specification and Guide for Ammonium Hydroxide
TBDSNARFChemical Analytical Methods TFRevision to SEMI C28-0618, Specification and Guide for Hydrofluoric Acid
TBDSNARFChemical Analytical Methods TFRevision to SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)
TBDSNARFChemical Analytical Methods TFRevision to SEMI C35-0118, Specification and Guide for Nitric Acid
TBDSNARFChemical Analytical Methods TFRevision to SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% Solution
TBDSNARFChemical Analytical Methods TFRevision to SEMI C41-0618, Specification and Guide for 2-Propanol
TBDSNARFChemical Analytical Methods TFRevision to SEMI C45-0518, Specification and Guide for Tetraethylorthosilicate (TEOS)
TBDSNARFChemical Analytical Methods TFRevision to SEMI C62-0309 (Reapproved 0618), Specification for Porogen Precursors Used in Low K CVD Processes
TBDSNARFChemical Analytical Methods TFRevision to SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes
#1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
#
When
TF
Details
R6315CCycle 6-2023Chemical Analytical Methods TFRevision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide
R6388BCycle 6-2023Chemical Analytical Methods TFRevision to SEMI C44-0618, Specification and Guide for Sulfuric Acid
R6917Cycle 6-2023High Purity Liquid Assemblies & Systems TFRevision to SEMI F39-0621, Guide for Chemical Blending Systems
6828DCycle 6 or 7-2023High Purity Liquid Assemblies & Systems TFRevision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Abolished

#
TF
Title
6713High Purity Polymer Materials and Components TFLine Item Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
[Abandoned SNARF bc of change in scope, new revision SNARF reissued]


Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting is tentatively scheduled for the week of November 6-9, in conjunction with SEMI Standards NA Fall Meetings 2023. Schedule details TBD. Please check www.semi.org/standards for updates.

Tentative Schedule:

        o UPW TF (will not meet during the meeting set)

        o Water Management TF (will not meet during the meeting set)

        o High Purity Polymer Material & Components TF (will not meet during the meeting set)

    Monday

    Tuesday

        o TBD, High Purity Liquid Assemblies & System TF

        o TBD, Chemical Analytical Methods TF

        o TBD, Chemical Mechanical Planarization Consumables TF

        o TBD, Statistical Methods TF

        o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting, Day 1

    Wednesday
        o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting, Day 2