SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: OVTCCM
Date of Meeting: 04/01/2021
Meeting End Date: 04/01/2021
Recording SEMI Standards Staff: Michelle Sun
CER Posted to Web: 04/13/2021


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6722Reapproval of SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint DevicesPassed6722 Ballot Report Template.pdf6722 Ballot Report Template.pdf
6724Reapproval of SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow DevicePassed6724 Ballot Report Template.pdf6724 Ballot Report Template.pdf
6682Line Item Revision to E142-XXXX: Specification for Substrate Mapping, E142.1-1016 XML Schema for Substrate Mapping and E142.2-1016 SECS II Protocol for Substrate Mapping6682 Ballot Line-Item report.pdf6682 Ballot Line-Item report.pdf
LI-1Add package path to the layoutPassed
LI-2Update E142 and E142.1 related informationPassed
LI-3Changes to align with the latest version of the Style ManualPassed
6566ANew Standard: Specification for Malware Free Equipment IntegrationFailed
6721Reapproval of SEMI E164 - Specification for EDA Common MetadataPassed6721 Ballot Report Template.pdf6721 Ballot Report Template.pdf
6347Revision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data Collection Management to SEMI E134-0414, Specification for Data Collection ManagementFailed
6719Revision to SEMI E132-0419, Specification for Equipment Client Authentication and AuthorizationFailed
6720Revision to SEMI E134-0319, Specification for Data Collection ManagementFailed
6718Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)Failed
6346ERevision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-0419: Specification for Equipment Client Authentication and AuthorizationFailed
6723Reapproval of SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate TrackingPassed6723 Ballot Report Template.pdf6723 Ballot Report Template.pdf
6597Line Item Revision to SEMI E173-0415E: Specification for XML SECS-II Message Notation (SMN)6597 Ballot Line-Item report.pdf6597 Ballot Line-Item report.pdf
LI-1Minimal Logging ClarificationPassed
LI-2Element OrderPassed
6552ALine Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)6552A Ballot Line-Item report.pdf6552A Ballot Line-Item report.pdf
LI-1Query Interface SetupPassed with editorial changes
LI-3S7F17/F18 ClarificationPassed
6552BLine Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)6552B Line-Item report.pdf6552B Line-Item report.pdf
LI-1Logical Naming ConventionsPassed; Ratification Ballot to be issued


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
Approved on July 28, 2020
6648Adjudication Locale TransferABFILine Item Revisions to E142-0211 (Reapproved 1016): Specification for Substrate Mapping
LI-1 – To add substrate types
LI-2 – To add device level raw materials
6552AAdjudication Locale TransferGEM300Line Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)
LI-2 - Logical Naming Conventions
6346CAdjudication Locale TransferGEM300Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
6527BAdjudication Locale TransferDDARevision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)
6553BAdjudication Locale TransferDDARevision to SEMI E134-0319 Specification for Data Collection Management
6571BAdjudication Locale TransferDDARevision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
6598AAdjudication Locale TransferDDALine Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services
Approved on September 1, 2020
6346DBallot AuthorizationDDARevision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization
6527CBallot AuthorizationDDARevision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)
6552B LI-1Ballot AuthorizationGEM300Line Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)
LI-1 – Logical Naming Conventions
6553CBallot AuthorizationDDARevision to SEMI E134-0319, Specification for Data Collection Management
6571CBallot AuthorizationDDARevision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
6598B LI-1Ballot AuthorizationGEM300Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services
LI-1 – Clarify T8
6647Ballot AuthorizationGEM300Line Item Revision to Standard E116-0518 Specification for Equipment Performance Tracking (EPT) and E116.1-0707 (Reapproved 0518) Specification For Secs-Ii Protocol for Equipment Performance Tracking (EPT)
6683SNARF ApprovalGEM300Line Item Revisions to Standard SEMI E148-1109
6682SNARF ApprovalABFILine Item Revision to E142-XXXX: Specification for Substrate Mapping, E142.1-1016 XML Schema for Substrate Mapping and E142.2-1016 SECS II Protocol for Substrate Mapping
Approved on November 25, 2020
6346DAdjudication Locale TransferDDARevision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
6527CAdjudication Locale TransferDDARevision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)
6553CAdjudication Locale TransferDDARevision to SEMI E134-0319 Specification for Data Collection Management
6571CAdjudication Locale TransferDDARevision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
6598BAdjudication Locale TransferGEM300Line Item Revision to SEMI E37-0819: Specification For High-Speed SECS Message Services (HSMS) Generic Services
Line Item Title: Clarify T8
Approved on December 15, 2020
N/AOVTCCMN/AIssuance of the ballot for OVTCCM
Approved on February 1, 2021
6718SNARF ApprovalDDARevision to SEMI E125: Specification for Equipment Self Description (EqSD)
6719SNARF ApprovalDDARevision to SEMI E132: Specification for Equipment Client Authentication and Authorization
6720SNARF ApprovalDDARevision to SEMI E134: Specification for Data Collection Management
6743SNARF ApprovalGUIRevision to SEMI E95, Specification for Human Interface for Semiconductor Manufacturing Equipment
6724SNARF ApprovalSensor BusReapproval of SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
6722SNARF ApprovalSensor BusReapproval of SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
6723SNARF ApprovalGEM300Reapproval of SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking
6721SNARF ApprovalDDAReapproval of SEMI E164 - Specification for EDA Common Metadata
6724Ballot AuthorizationSensor BusReapproval of SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
6722Ballot AuthorizationSensor BusReapproval of SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
6743Ballot AuthorizationGUIRevision to SEMI E95, Specification for Human Interface for Semiconductor Manufacturing Equipment
6346EBallot AuthorizationDDA6346E - Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
6718Ballot AuthorizationDDARevision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)
6720Ballot AuthorizationDDARevision to SEMI E134-0319, Specification for Data Collection Management
6719Ballot AuthorizationDDARevision to SEMI E132-0419, Specification for Equipment Client Authentication and Authorization
6347Ballot AuthorizationDDARevision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data Collection Management to SEMI E134-0414, Specification for Data Collection Management
6345Ballot AuthorizationDDARevision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Self Description (EqSD) to SEMI E125-0414, Specification for Equipment Self Description (EqSD)
6721Ballot AuthorizationDDAReapproval of SEMI E164 - Specification for EDA Common Metadata
6598CBallot AuthorizationGEM300Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services
6572Ballot AuthorizationGEM300Revision to SEMI E30-0418: Specification for The Generic Model for Communications and Control of Manufacturing Equipment (GEM)
6723Ballot AuthorizationGEM300Reapproval of SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking
6566ABallot AuthorizationCDSNew Standard: Specification for Malware Free Equipment Integration
6682Ballot AuthorizationABFILine Item Revision to E142-XXXX: Specification for Substrate Mapping, E142.1-1016 XML Schema for Substrate Mapping and E142.2-1016 SECS II Protocol for Substrate Mapping
Approved on March 24, 2021
6744SNARF ApprovalSensor BusLine Item Revision to SEMI E54.4-0316, Specification for Sensor/Actuator Network Communications for DeviceNet


Authorized Activities
None.

Authorized Ballots

#
When
TF
Details
6566BCycle 5-2021CDSNew Standard: Specification for Malware Free Equipment Integration
6346FCycle 5-2021DDARevision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization
6347ACycle 5-2021DDARevision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data
Collection Management to SEMI E134-0414, Specification for Data Collection Management
6718ACycle 5-2021DDARevision to E125 SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EqSD)
6719ACycle 5-2021DDARevision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
6720ACycle 5-2021DDARevision to SEMI E134-0414: Specification for Data Collection Management
6345Cycle 5-2021DDARevision to Add a New Subordinate Standard: Specification for Protocol Buffers for
Equipment Self Description (EqSD) to SEMI E125-0414, Specification for Equipment Self Description (EqSD)
6598CCycle 5-2021GEM300Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services and E37.1-XXYY: Specification For High-Speed Secs Message Service Single Selected-Session Mode (HSMS-SS)
6683Cycle 5-2021GEM300Line Item Revision to Standard SEMI E148-1109 (Reapproved 0614)
SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF
THE TS-CLOCK OBJECT
6572Cycle 5-2021GEM300Revision to SEMI E30-0418: Specification for The Generic Model for Communications and Control of Manufacturing Equipment (GEM)
6743Cycle 5-2021GUIRevision to SEMI E95-1101, Specification for Human Interface for Semiconductor
Manufacturing Equipment
6744Cycle 5-2021Sensor BusLine Item Revision to SEMI E54.4-0316, Specification for Sensor/Actuator Network Communications for DeviceNet


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
check www.semi..org/standards for latest update