# | Type | SC/TF/WG | Details |
Approved on July 28, 2020 |
6648 | Adjudication Locale Transfer | ABFI | Line Item Revisions to E142-0211 (Reapproved 1016): Specification for Substrate Mapping
LI-1 – To add substrate types
LI-2 – To add device level raw materials |
6552A | Adjudication Locale Transfer | GEM300 | Line Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)
LI-2 - Logical Naming Conventions |
6346C | Adjudication Locale Transfer | GEM300 | Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization |
6527B | Adjudication Locale Transfer | DDA | Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD) |
6553B | Adjudication Locale Transfer | DDA | Revision to SEMI E134-0319 Specification for Data Collection Management |
6571B | Adjudication Locale Transfer | DDA | Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization |
6598A | Adjudication Locale Transfer | DDA | Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services |
Approved on September 1, 2020 |
6346D | Ballot Authorization | DDA | Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization |
6527C | Ballot Authorization | DDA | Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD) |
6552B LI-1 | Ballot Authorization | GEM300 | Line Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)
LI-1 – Logical Naming Conventions |
6553C | Ballot Authorization | DDA | Revision to SEMI E134-0319, Specification for Data Collection Management |
6571C | Ballot Authorization | DDA | Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization |
6598B LI-1 | Ballot Authorization | GEM300 | Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services
LI-1 – Clarify T8 |
6647 | Ballot Authorization | GEM300 | Line Item Revision to Standard E116-0518 Specification for Equipment Performance Tracking (EPT) and E116.1-0707 (Reapproved 0518) Specification For Secs-Ii Protocol for Equipment Performance Tracking (EPT) |
6683 | SNARF Approval | GEM300 | Line Item Revisions to Standard SEMI E148-1109 |
6682 | SNARF Approval | ABFI | Line Item Revision to E142-XXXX: Specification for Substrate Mapping, E142.1-1016 XML Schema for Substrate Mapping and E142.2-1016 SECS II Protocol for Substrate Mapping |
Approved on November 25, 2020 |
6346D | Adjudication Locale Transfer | DDA | Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization |
6527C | Adjudication Locale Transfer | DDA | Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD) |
6553C | Adjudication Locale Transfer | DDA | Revision to SEMI E134-0319 Specification for Data Collection Management |
6571C | Adjudication Locale Transfer | DDA | Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization |
6598B | Adjudication Locale Transfer | GEM300 | Line Item Revision to SEMI E37-0819: Specification For High-Speed SECS Message Services (HSMS) Generic Services
Line Item Title: Clarify T8 |
Approved on December 15, 2020 |
N/A | OVTCCM | N/A | Issuance of the ballot for OVTCCM |
Approved on February 1, 2021 |
6718 | SNARF Approval | DDA | Revision to SEMI E125: Specification for Equipment Self Description (EqSD) |
6719 | SNARF Approval | DDA | Revision to SEMI E132: Specification for Equipment Client Authentication and Authorization |
6720 | SNARF Approval | DDA | Revision to SEMI E134: Specification for Data Collection Management |
6743 | SNARF Approval | GUI | Revision to SEMI E95, Specification for Human Interface for Semiconductor Manufacturing Equipment |
6724 | SNARF Approval | Sensor Bus | Reapproval of SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device |
6722 | SNARF Approval | Sensor Bus | Reapproval of SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices |
6723 | SNARF Approval | GEM300 | Reapproval of SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking |
6721 | SNARF Approval | DDA | Reapproval of SEMI E164 - Specification for EDA Common Metadata |
6724 | Ballot Authorization | Sensor Bus | Reapproval of SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device |
6722 | Ballot Authorization | Sensor Bus | Reapproval of SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices |
6743 | Ballot Authorization | GUI | Revision to SEMI E95, Specification for Human Interface for Semiconductor Manufacturing Equipment |
6346E | Ballot Authorization | DDA | 6346E - Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization |
6718 | Ballot Authorization | DDA | Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD) |
6720 | Ballot Authorization | DDA | Revision to SEMI E134-0319, Specification for Data Collection Management |
6719 | Ballot Authorization | DDA | Revision to SEMI E132-0419, Specification for Equipment Client Authentication and Authorization |
6347 | Ballot Authorization | DDA | Revision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data Collection Management to SEMI E134-0414, Specification for Data Collection Management |
6345 | Ballot Authorization | DDA | Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Self Description (EqSD) to SEMI E125-0414, Specification for Equipment Self Description (EqSD) |
6721 | Ballot Authorization | DDA | Reapproval of SEMI E164 - Specification for EDA Common Metadata |
6598C | Ballot Authorization | GEM300 | Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services |
6572 | Ballot Authorization | GEM300 | Revision to SEMI E30-0418: Specification for The Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
6723 | Ballot Authorization | GEM300 | Reapproval of SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking |
6566A | Ballot Authorization | CDS | New Standard: Specification for Malware Free Equipment Integration |
6682 | Ballot Authorization | ABFI | Line Item Revision to E142-XXXX: Specification for Substrate Mapping, E142.1-1016 XML Schema for Substrate Mapping and E142.2-1016 SECS II Protocol for Substrate Mapping |
Approved on March 24, 2021 |
6744 | SNARF Approval | Sensor Bus | Line Item Revision to SEMI E54.4-0316, Specification for Sensor/Actuator Network Communications for DeviceNet |
# | When | TF | Details |
6566B | Cycle 5-2021 | CDS | New Standard: Specification for Malware Free Equipment Integration |
6346F | Cycle 5-2021 | DDA | Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization |
6347A | Cycle 5-2021 | DDA | Revision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data
Collection Management to SEMI E134-0414, Specification for Data Collection Management |
6718A | Cycle 5-2021 | DDA | Revision to E125 SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EqSD) |
6719A | Cycle 5-2021 | DDA | Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization |
6720A | Cycle 5-2021 | DDA | Revision to SEMI E134-0414: Specification for Data Collection Management |
6345 | Cycle 5-2021 | DDA | Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for
Equipment Self Description (EqSD) to SEMI E125-0414, Specification for Equipment Self Description (EqSD) |
6598C | Cycle 5-2021 | GEM300 | Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services and E37.1-XXYY: Specification For High-Speed Secs Message Service Single Selected-Session Mode (HSMS-SS) |
6683 | Cycle 5-2021 | GEM300 | Line Item Revision to Standard SEMI E148-1109 (Reapproved 0614)
SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF
THE TS-CLOCK OBJECT |
6572 | Cycle 5-2021 | GEM300 | Revision to SEMI E30-0418: Specification for The Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
6743 | Cycle 5-2021 | GUI | Revision to SEMI E95-1101, Specification for Human Interface for Semiconductor
Manufacturing Equipment |
6744 | Cycle 5-2021 | Sensor Bus | Line Item Revision to SEMI E54.4-0316, Specification for Sensor/Actuator Network Communications for DeviceNet |