SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: Online
Date of Meeting: 05/06/2021
Meeting End Date: 05/06/2021
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 05/17/2021
Leadership Changes
None.
TC Chapter Structure Changes
New TF |
| S1 TF |
| S5 TF |
| S7 TF |
| S12 TF |
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 6515 | Line Item Revision of SEMI S23-1216 - Guide for Energy, Utilities, and Materials Use Efficiency of Semiconductor Manufacturing Equipment | Refer below |  6515 A&R.pdf |
| Line Item 1 - Changes related to process cooling water. | Passed with editorial changes |
| 6696 | Line Item Revision to SEMI S2-0818Ea
Environmental, Health, And Safety Guideline For Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Sections 18.6.3 and 18.7.5) | Refer below |  6696 A&R.pdf |
| Line Item 1 - Delayed Revision Related to Sections 18.6.3 and 18.7.5 | Passed as balloted |
| 6651A | Line Item Revision to SEMI S2-0818Ea
Environmental, Health, And Safety Guideline For Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Pressure System) | Refer below |  |
| Line Item 1 - Delayed Revision related to pressure systems | Failed and returned to TF |  6651A A&R failed.pdf |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 6781 | SNARF | S5 TF | Line Item Revision of SEMI S5, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases |
| 6782 | SNARF | S12 TF | Line Item Revision of SEMI S12, Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination |
| 6783 | SNARF | S1 TF | Line Item Revisions to SEMI S1-1015, Safety Guideline for Equipment Safety Labels |
| 6784 | SNARF | Fire Protection TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Changes to materials of construction criterion in fire and smoke risk for pre-evaluation figure) |
Authorized Ballots
# | When | TF | Details |
| 6354A | Cycle 5, 6, 7, 8 or 9-2021 | S2 Korean High Pressure Gas Safety TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Addition of related information) |
| 6171B | Cycle 5, 6, 7, 8 or 9-2021 | Chemical Exposure TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Chemical exposure) |
| 6439A | Cycle 5, 6, 7, 8 or 9-2021 | Restriction of Materials TF | New Standard: Practice for PFOA Restriction in Fluoromaterials |
| 6651B | Cycle 5, 6, 7, 8 or 9-2021 | S2 Pressure Guideline TF | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delay Revision related to pressure guidelines) |
| 6781 | Cycle 5, 6, 7, 8 or 9-2021 | S5 TF | Line Item Revision of SEMI S5, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases |
| 6782 | Cycle 5, 6, 7, 8 or 9-2021 | S12 TF | Line Item Revision of SEMI S12, Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination |
| 6783 | Cycle 5, 6, 7, 8 or 9-2021 | S1 TF | Line Item Revisions to SEMI S1-1015, Safety Guideline for Equipment Safety Labels |
| 6784 | Cycle 5, 6, 7, 8 or 9-2021 | Fire Protection TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Changes to materials of construction criterion in fire and smoke risk for pre-evaluation figure) |
.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
July 22, 2021 (9:00 AM - 3:00 PM Pacific) online meeting. Check www.semi.org/standards for the latest update. Also, the TC Chapter will also meet in conjunction with SEMICON West in December 2021.
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