SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: Online
Date of Meeting: 05/06/2021
Meeting End Date: 05/06/2021
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 05/17/2021


Leadership Changes
None.

Committee Structure Changes

New TF
S1 TF
S5 TF
S7 TF
S12 TF


Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6515Line Item Revision of SEMI S23-1216 - Guide for Energy, Utilities, and Materials Use Efficiency of Semiconductor Manufacturing EquipmentRefer below6515 A&R.pdf6515 A&R.pdf
Line Item 1 - Changes related to process cooling water.Passed with editorial changes
6696Line Item Revision to SEMI S2-0818Ea
Environmental, Health, And Safety Guideline For Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Sections 18.6.3 and 18.7.5)
Refer below6696 A&R.pdf6696 A&R.pdf
Line Item 1 - Delayed Revision Related to Sections 18.6.3 and 18.7.5Passed as balloted
6651ALine Item Revision to SEMI S2-0818Ea
Environmental, Health, And Safety Guideline For Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Pressure System)
Refer below
Line Item 1 - Delayed Revision related to pressure systemsFailed and returned to TF6651A A&R failed.pdf6651A A&R failed.pdf


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6781SNARFS5 TFLine Item Revision of SEMI S5, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases
6782SNARFS12 TFLine Item Revision of SEMI S12, Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination
6783SNARFS1 TFLine Item Revisions to SEMI S1-1015, Safety Guideline for Equipment Safety Labels
6784SNARFFire Protection TFLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Changes to materials of construction criterion in fire and smoke risk for pre-evaluation figure)


Authorized Ballots

#
When
TF
Details
6354ACycle 5, 6, 7, 8 or 9-2021S2 Korean High Pressure Gas Safety TFLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Addition of related information)
6171BCycle 5, 6, 7, 8 or 9-2021Chemical Exposure TFLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Chemical exposure)
6439ACycle 5, 6, 7, 8 or 9-2021Restriction of Materials TFNew Standard: Practice for PFOA Restriction in Fluoromaterials
6651BCycle 5, 6, 7, 8 or 9-2021S2 Pressure Guideline TFLine Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delay Revision related to pressure guidelines)
6781Cycle 5, 6, 7, 8 or 9-2021S5 TFLine Item Revision of SEMI S5, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases
6782Cycle 5, 6, 7, 8 or 9-2021S12 TFLine Item Revision of SEMI S12, Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination
6783Cycle 5, 6, 7, 8 or 9-2021S1 TFLine Item Revisions to SEMI S1-1015, Safety Guideline for Equipment Safety Labels
6784Cycle 5, 6, 7, 8 or 9-2021Fire Protection TFLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Changes to materials of construction criterion in fire and smoke risk for pre-evaluation figure)
.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
July 22, 2021 (9:00 AM - 3:00 PM Pacific) online meeting. Check www.semi.org/standards for the latest update. Also, the TC Chapter will also meet in conjunction with SEMICON West in December 2021.