SEMI International Standards
Standards Locale: North America |
Committee: Silicon Wafer |
Place of Meeting: Moscone South Hall - San Francisco, CA |
Date of Meeting: 07/09/2019 |
Meeting End Date: 07/09/2019 |
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Recording SEMI Standards Staff: Kevin Nguyen |
CER Posted to Web: 07/17/2019 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
tbd | SNARF | Int'l ASI TF | Reapproval of SEMI M58 Test Method For Evaluating DMA Based Particle Deposition Systems And Processes |
6554 | SNARF | Int'l Test Methods TF | New Standard: Practice for Carrier profiling of semiconductors by Scanning Capacitance Microscopy and Scanning Spreading Resistance Microscopy |
Authorized Ballots
# | When | TF | Details |
tbd | cycle 7-19 | Int'l ASI TF | Reapproval of SEMI M58 Test Method For Evaluating DMA Based Particle Deposition Systems And Processes |
R6519 | cycle 6-19 | Int'l ASI TF | Ratification Ballot - Revision of SEMI M53-0219, Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Monodispere Reference Spheres on Unpatterned Semiconductor Wafer Surfaces |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
March 31, 2020 9 AM - Noon Pacific Time, Milpitas, CA in conjunction with NA Spring Meetings. Check www.semi.org/standards for more details.
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