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Standards Locale: North America

Committee: Facilities & Gases

Place of Meeting: Moscone Center, San Francisco, California/USA

Date of Meeting: 07/11/2023

Meeting End Date: 07/11/2023

Recording SEMI Standards Staff: Laura Nguyen

CER Posted to Web: 07/28/2023

Document #	Document Title	TC Chapter Action#1,2	A&R Forms for Approved Ballots
Facilities
None
Gases
7052	Line-Item Revision to SEMI F20-0706, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components used in General Purpose, High Purity and Ultra-high Purity Semiconductor Manufacturing Applications		7052_ProceduralReview.pdf
L1	Update throughout to comply to Regs, PM and SM.	Passed, as balloted.
L2	Update “Plate” reference per ASTM E45.	Passed, as balloted.
7092	Line-Item Revision to SEMI E29-1110 (Reapproved 0417), Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters		7092_ProceduralReview.pdf
L1	“mass flow transducer” is deleted to remove confusion.	Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued.
7093	Line-Item Revision to SEMI F62-1016, Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects		7093_ProceduralReview.pdf
L1	Remove the flow rate limitation on mass flow controller to support the flow rate testing above 30slm.	Passed, as balloted.
L2	Update throughout to comply to Regs, PM and SM.	Passed, as balloted.

#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
#2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#	Type	SC/TF/WG	Details
Facilities
None
Gases
7092	SNARF/ Ballot Authorization	Mass Flow Controller TF	Line-Item Revision to SEMI E29-1110 (Reapproved 0417), Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters – Approved by GCS on 05/30/2023
7093	SNARF/ Ballot Authorization	Mass Flow Controller TF	Line-Item Revision to SEMI F62-1016, Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects – Approved by GCS on 05/30/2023
7094	SNARF/ Ballot Authorization	Mass Flow Controller TF	Reapproval of SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak Rates – Approved by GCS on 05/30/2023
7095	SNARF/ Ballot Authorization	Mass Flow Controller TF	Reapproval of SEMI E27-1017, Guide for Mass Flow Controller and Mass Flow Meter Linearity – Approved by GCS on 05/30/2023
7096	SNARF/ Ballot Authorization	Mass Flow Controller TF	Reapproval of SEMI E66-0611 (Reapproved 0517), Test Method for Determining Particle Contribution by Mass Flow Controllers – Approved by GCS on 05/30/2023
7097	SNARF/ Ballot Authorization	Gases Specification TF	Line-Item Revision to SEMI C54-1116, Specification for Oxygen – Approved by GCS on 05/30/2023
7098	SNARF/ Ballot Authorization	Gases Specification TF	Line-Item Revision to SEMI C56-1116, Specification for Dichlorosilane – Approved by GCS on 05/30/2023

Authorized Activities
None.

Authorized Ballots

Listing of documents authorized by the Originating TC Chapter for Letter Ballot.

#	When	TF	Details
Facilities
None
Gases
6916	Cycle 6 or 7-2023	Heater Jacket TF	Replacement of SEMI F109-0212, Guide for Heater Systems Requirements, as a New Standard: Guide for Material Selection for Heater Systems
7097	Cycle 6 or 7-2023	Gases Specification TF	Line-Item Revision to SEMI C54-1116, Specification for Oxygen
7098	Cycle 6 or 7-2023	Gases Specification TF	Line-Item Revision to SEMI C56-1116, Specification for Dichlorosilane

SNARF(s) Granted a One-Year Extension

#	TF	Title	Expiration Date
Facilities
None
Gases
6394	Materials of Construction of Gas Delivery Systems TF	Line Item Revision to SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems	West 2024

#1: If the Standards Document Development Project is found to be continuing, but cannot be completed within the current project period, the TC Chapter may grant a one-year extension at a time, as many times as necessary. [Regulations § 8.3]

SNARF(s) Abolished

#	TF	Title
Facilities
None
Gases
7094	Mass Flow Controller TF	Reapproval of SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak Rates [Abandon SNARF bc of change in scope, new SNARF to be issued]
7095	Mass Flow Controller TF	Reapproval of SEMI E27-1017, Guide for Mass Flow Controller and Mass Flow Meter Linearity [Abandon SNARF bc of change in scope, new SNARF to be issued]
7096	Mass Flow Controller TF	Reapproval of SEMI E66-0611 (Reapproved 0517), Test Method for Determining Particle Contribution by Mass Flow Controllers Abandon SNARF bc of [change in scope, new SNARF to be issued]

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting is tentatively scheduled for the week of November 6-9, in conjunction with SEMI Standards NA Fall Meetings 2023. Schedule details TBD. Please check www.semi.org/standards for updates.

Facilities and Gases Task Forces meet Monday, and the joint Facilities & Gases TC Chapter will meet on Tuesday.

Tentative Schedule

• Monday, November 6
  09:00-10:00, Materials of Construction of Gas Delivery Systems
  10:00-11:00, Filters & Purifiers
  11:00-12:00 Noon, Mass Flow Controller
  13:00-14:00, Gases Specification
  14:00-15:00, Heater Jacket
  
  TBD, Voltage Sag Immunity TF
  TBD, BIM TF
  
  
• Tuesday, November 7
  09:00-12:00 Noon, Facilities & Gases NA TC Chapter