SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: Moscone Center, San Francisco, California/USA
Date of Meeting: 07/11/2023
Meeting End Date: 07/11/2023
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 07/28/2023


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
TC Chapter Action#1,2
A&R Forms for Approved Ballots
Facilities
None
Gases
7052Line-Item Revision to SEMI F20-0706, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components used in General Purpose, High Purity and Ultra-high Purity Semiconductor Manufacturing Applications7052_ProceduralReview.pdf7052_ProceduralReview.pdf
L1Update throughout to comply to Regs, PM and SM.Passed, as balloted.
L2Update “Plate” reference per ASTM E45.Passed, as balloted.
7092Line-Item Revision to SEMI E29-1110 (Reapproved 0417), Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters7092_ProceduralReview.pdf7092_ProceduralReview.pdf
L1“mass flow transducer” is deleted to remove confusion.Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued.
7093Line-Item Revision to SEMI F62-1016, Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects7093_ProceduralReview.pdf7093_ProceduralReview.pdf
L1Remove the flow rate limitation on mass flow controller to support the flow rate testing above 30slm.Passed, as balloted.
L2Update throughout to comply to Regs, PM and SM.Passed, as balloted.
#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
#2:
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
Facilities
None
Gases
7092SNARF/
Ballot Authorization
Mass Flow Controller TFLine-Item Revision to SEMI E29-1110 (Reapproved 0417), Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters
– Approved by GCS on 05/30/2023
7093SNARF/
Ballot Authorization
Mass Flow Controller TFLine-Item Revision to SEMI F62-1016, Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects
– Approved by GCS on 05/30/2023
7094SNARF/
Ballot Authorization
Mass Flow Controller TFReapproval of SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak Rates
– Approved by GCS on 05/30/2023
7095SNARF/
Ballot Authorization
Mass Flow Controller TFReapproval of SEMI E27-1017, Guide for Mass Flow Controller and Mass Flow Meter Linearity
– Approved by GCS on 05/30/2023
7096SNARF/
Ballot Authorization
Mass Flow Controller TFReapproval of SEMI E66-0611 (Reapproved 0517), Test Method for Determining Particle Contribution by Mass Flow Controllers
– Approved by GCS on 05/30/2023
7097SNARF/
Ballot Authorization
Gases Specification TFLine-Item Revision to SEMI C54-1116, Specification for Oxygen
– Approved by GCS on 05/30/2023
7098SNARF/
Ballot Authorization
Gases Specification TFLine-Item Revision to SEMI C56-1116, Specification for Dichlorosilane
– Approved by GCS on 05/30/2023


Authorized Activities
None.

Authorized Ballots

Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
#
When
TF
Details
Facilities
None
Gases
6916Cycle 6 or 7-2023Heater Jacket TFReplacement of SEMI F109-0212, Guide for Heater Systems Requirements,
as a New Standard: Guide for Material Selection for Heater Systems
7097Cycle 6 or 7-2023Gases Specification TFLine-Item Revision to SEMI C54-1116, Specification for Oxygen
7098Cycle 6 or 7-2023Gases Specification TFLine-Item Revision to SEMI C56-1116, Specification for Dichlorosilane


SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
Facilities
None
Gases
6394Materials of Construction of Gas Delivery Systems TFLine Item Revision to SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery SystemsWest 2024
#1: If the Standards Document Development Project is found to be continuing, but cannot be completed within the current project period, the TC Chapter may grant a one-year extension at a time, as many times as necessary. [Regulations 8.3]


SNARF(s) Abolished

#
TF
Title
Facilities
None
Gases
7094Mass Flow Controller TFReapproval of SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak Rates
[Abandon SNARF bc of change in scope, new SNARF to be issued]
7095Mass Flow Controller TFReapproval of SEMI E27-1017, Guide for Mass Flow Controller and Mass Flow Meter Linearity
[Abandon SNARF bc of change in scope, new SNARF to be issued]
7096Mass Flow Controller TFReapproval of SEMI E66-0611 (Reapproved 0517), Test Method for Determining Particle Contribution by Mass Flow Controllers
Abandon SNARF bc of [change in scope, new SNARF to be issued]


Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting


The next meeting is tentatively scheduled for the week of November 6-9, in conjunction with SEMI Standards NA Fall Meetings 2023. Schedule details TBD. Please check
www.semi.org/standards for updates.

Facilities and Gases Task Forces meet Monday, and the joint Facilities & Gases TC Chapter will meet on Tuesday.

Tentative Schedule

  • Monday, November 6
    09:00-10:00, Materials of Construction of Gas Delivery Systems
    10:00-11:00, Filters & Purifiers
    11:00-12:00 Noon, Mass Flow Controller
    13:00-14:00, Gases Specification
    14:00-15:00, Heater Jacket

    TBD, Voltage Sag Immunity TF
    TBD, BIM TF

  • Tuesday, November 7
    09:00-12:00 Noon, Facilities & Gases NA TC Chapter