SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: 7/13/2023
Date of Meeting: 07/13/2023
Meeting End Date: 07/13/2023
Recording SEMI Standards Staff: Michelle Sun
CER Posted to Web: 07/27/2023


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
7065Line Item Revision to SEMI E172-0320, Specification for SECS Equipment Data Dictionary (SEDD)AR - 7065.pdfAR - 7065.pdf
LI-1Add Name element to help identify SEDD objects.Passed
LI-2Add Well-Known Name element to SEDD objects.Passed
LI-3Update Schema File so not applicable items are handled consistentlyPassed with editorial changes
7066Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)AR - 7066.pdfAR - 7066.pdf
LI-1Rework Carrier Ready to Unload Prediction (CaRTUP) functionality into Carrier Complete Prediction (CCP) functionality and address gaps.Failed
LI-2Clarify ContentMap behavior.Passed
LI-3Update CMS Compliance Statement to include missing information.Passed
6743ARevision to SEMI E95-1101, Specification for Human Interface for Semiconductor Manufacturing EquipmentFailed
6924ANew Standard: Specification for Equipment Management of Consumables and DurablesPassed, Ratification Ballot to be IssuedAR - 6924A.pdfAR - 6924A.pdf
6925ANew Subordinate Standard: Specification for SECS-II Protocol for Equipment Management of Consumables and DurablesPassed, Ratification Ballot to be IssuedAR - 6925A.pdfAR - 6925A.pdf
6991Line Item Revision to SEMI E4-0418, Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)AR - 6991.pdfAR - 6991.pdf
LI-1Bias Free TerminologyPassed
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.



Ratification Ballot Results

Document #
Document Title
ISC A&R Action
A&R Forms
R7002Revision to SEMI E132-0922 Specification for Equipment Client Authentication and Authorization and SEMI E132.2-0422e Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)PassedAR-R7002.pdfAR-R7002.pdf
Note 1: Passed Ratification ballots will be submitted to SEMI publication for final processing.

Note 2: Failed Ratification ballots were returned to the originating task forces for re-work and re-balloting or abandoning.



Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
7068SNARFEDP TFNew Standard: Specification for Equipment Data Publication
7069SNARFEDP TFRevision to Add a New Subordinate Standard: Specification for Common Data for Etch Components to Specification for Equipment Data Publication
7070SNARFEDP TFRevision to Add a New Subordinate Standard: Specification for Common Data for Vacuum Components to Specification for Equipment Data Publication
7065SNARFGEM300 TFLine Item Revision to SEMI E172-0320, Specification for SECS Equipment Data Dictionary (SEDD)
7066SNARFGEM300 TFLine Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)
7067SNARFPCS TFLine Item Revision to SEMI E133-1218, Specification for Automated Process Control Systems Interface and SEMI E133.0318, Specification for XML Messaging for Process Control System (PCS)
7063SNARFGEM300 TFReapproval of SEMI E40-1218, Specification for Processing Management
7064SNARFGEM300 TFReapproval of SEMI E39-1218, Specification for Object Services: Concepts, Behavior, and Services
7068Ballot Authorization for Cycle 5-2023EDP TFNew Standard: Specification for Equipment Data Publication
7069Ballot Authorization for Cycle 5-2023EDP TFRevision to Add a New Subordinate Standard: Specification for Common Data for Etch Components to Specification for Equipment Data Publication
7070Ballot Authorization for Cycle 5-2023EDP TFRevision to Add a New Subordinate Standard: Specification for Common Data for Vacuum Components to Specification for Equipment Data Publication
6743ABallot Authorization for Cycle 5-2023GUI TFRevision to SEMI E95-1101, Specification for Human Interface for Semiconductor Manufacturing Equipment
7065Ballot Authorization for Cycle 5-2023GEM300 TFLine Item Revision to SEMI E172-0320, Specification for SECS Equipment Data Dictionary (SEDD)
7066Ballot Authorization for Cycle 5-2023GEM300 TFLine Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)
6991Ballot Authorization for Cycle 5-2023GEM300 TFLine-Item Revision to SEMI E4-0418, Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
6992Ballot Authorization for Cycle 5-2023GEM300 TFLine-Item Revision to SEMI E157-0611 (Reapproved 0616), Specification for Module Process Tracking
6924ABallot Authorization for Cycle 5-2023ABFINew Standard: Specification for Equipment Management of Consumables and Durables
6925ABallot Authorization for Cycle 5-2023ABFINew Subordinate Standard: Specification for SECS-II Protocol for Equipment Management of Consumables and Durables
7063Ballot Authorization for Cycle 5-2023GEM300 TFReapproval of SEMI E39-1218, Specification for Object Services: Concepts, Behavior, and Services
7064Ballot Authorization for Cycle 5-2023GEM300 TFReapproval of SEMI E40-1218, Specification for Processing Management


Authorized Activities

#
Type
SC/TF/WG
Details
7115SNARFGEM300Line Item Revision to SEMI E40-1218, Specification for Processing Management and SEMI E40.1-1218, Specification for SECS-II Protocol for Processing Management
7117SNARFGEM300Line Item Revision to SEMI E90-0921, Specification for Substrate Tracking and SEMI E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking
7119SNARFGEM300Line Item Revision to SEMI E116-0623, Specification for Equipment Performance Tracking and SEMI E116.1-0623, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)
7120SNARFGEM300Line Item Revision to SEMI E157-0611, Specification for Module Process Tracking
7116SNARFGEM300Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)
7114SNARFGEM300Line Item Revision to SEMI E30-0423, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) and SEMI E5-0323, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
7118SNARFGEM300Line Item Revision to SEMI E94-0314 (Reapproved 0819), Specification for Control Job Management and SEMI E94.1-0819, Specification for SECS-II Protocol for Control Job Management (CJM)


Authorized Ballots

#
When
TF
Details
6743BCycle 7-2023GUIRevision to SEMI E95-1101, Specification for Human Interface for Semiconductor
Manufacturing Equipment
6948Cycle 7-2023ABFILine Item Revisions to SEMI E142-0921 - Specification for Substrate Mapping, SEMI E142.1-0921 - Specification for XML Schema for Substrate Mapping, Line Item Revision to SEMI E142.2-0921 - Specification for SECS II Protocol For Substrate Mapping, Line Item Revision to SEMI E142.3-0921 - Specification for Web Services Protocol for Substrate Mapping, Line Item Revision to SEMI E142.4-0921 - Specification for Secs II Protocol For Substrate Mapping Using Item Transfer
7066ACycle 7-2023GEM300Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)
6926Cycle 7-2023CDSNew Standard: Specification for Equipment Operator Access Management and Monitoring
7067Cycle 7-2023PCSLine Item Revision to SEMI E133-1218, Specification for Automated Process Control Systems Interface and SEMI E133.1-0318, Specification for XML Messaging for Process Control System (PCS)
6836Cycle 7-2023GEM300Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS) and E90-0921, Specification for Substrate Tracking and E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking
7121Cycle 7-2023GEM300Reapproval of SEMI E39.1-1218, Specification for SECS-II Protocol for Object Services (OSS)
6846Cycle 7-2023Sensor BusReapproval of SEMI E54.1-0316, Specification for Sensor/Actuator Network Common Device Model
6847Cycle 7-2023Sensor BusReapproval of SEMI E54.2-0316, Guide for Writing Sensor/Actuator Network (SAN) Letter Ballots
7123Cycle 7-2023Sensor BusReapproval of SEMI E54.10-0600 (Reapproved 1017), Specification for Sensor/Actuator Network Specific Device Model for An in Situ Particle Monitor Device
6849Cycle 7-2023Sensor BusReapproval of SEMI E54.24-1116, Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENSen)
7125Cycle 7-2023PCSReapproval of SEMI E133.1-0318 - Specification for XML Messaging for Process Control System (PCS)
7126Cycle 7-2023DDAReapproval of SEMI E145-0414, Classification for Measurement Unit Symbols in XML
7127Cycle 7-2023DDAReapproval of SEMI E128-0414 (Reapproved 0519), Specification for XML Message Structures
7128Cycle 7-2023DDAReapproval of SEMI E138-0217, Specification for XML Semiconductor Common Components
7115Cycle 7-2023GEM300Line Item Revision to SEMI E40-1218, Specification for Processing Management and SEMI E40.1-1218, Specification for SECS-II Protocol for Processing Management
7117Cycle 7-2023GEM300Line Item Revision to SEMI E90-0921, Specification for Substrate Tracking and SEMI E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking
7119Cycle 7-2023GEM300Line Item Revision to SEMI E116-0623, Specification for Equipment Performance Tracking and SEMI E116.1-0623, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)
7120Cycle 7-2023GEM300Line Item Revision to SEMI E157-0611, Specification for Module Process Tracking
7116Cycle 7-2023GEM300Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)
7114Cycle 7-2023GEM300Line Item Revision to SEMI E5-0323, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) and SEMI E30-0423, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
7118Cycle 7-2023GEM300Line Item Revision to SEMI E94-0314 (Reapproved 0819), Specification for Control Job Management and SEMI E94.1-0819, Specification for SECS-II Protocol for Control Job Management (CJM)
R6924ACycle 6-2023ABFINew Standard: Specification for Equipment Management of Consumables and Durables
R6925ACycle 6-2023ABFINew Subordinate Standard: Specification for SECS-II Protocol for Equipment Management of Consumables and Durables


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Abolished

#
TF
Title
6649PCSLine Item Revision to SEMI E133-1218: Specification for Automated Process Control Systems Interface, and SEMI E133.1-0318: Specification for XML Messaging for Process Control System (PCS)


Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting is tentatively scheduled for Wednesday, November 8, 2023, at SEMI HQ, Milpitas. See http://www.semi.org/standards-events for the current list of events.

Monday, November 6, 2023

    - 9:00-10:00 – NA I&C Leadership Meeting
    - 10:00-12:00 – ABFI Task Force
    - 13:00-15:00 – GEM300 Task Force
    - 15:00-17:00 – EDP Task Force
Tuesday, November 7, 2023
    - 8:00-10:00 – GUI Task Force
    - 10:00-11:00 – ESEC Task Force
    - 11:00-12:00 – PCS Task Force
    - 13:00-14:30 – DDA Task Force
    - 14:30-16:00 – Sensor Bus Task Force
    - 16:00-17:30 – CDS Task Force
Wednesday, November 8, 2023
    - 9:00-12:00, 13:00-16:00 – I&C NA TC Chapter Meeting