SEMI International Standards
| Standards Locale: North America |
| Committee: EHS |
| Place of Meeting: Moscone Center - San Francisco, CA |
| Date of Meeting: 07/13/2023 |
| Meeting End Date: 07/13/2023 |
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| Recording SEMI Standards Staff: Kevin Nguyen |
| CER Posted to Web: 07/19/2023 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 6884A | Line Item Revision to SEMI S2-0821, Environmental, Health, And Safety Guideline For Semiconductor Manufacturing Equipment | Refer below | |
| Line Item 1 - Delayed Revisions related to lifting equipment and hinged loads (§§ 5.2, 18.6, and 18.7) | Failed and returned to TF for rework and reballot | |
| 7022 | Line Item Revisions to SEMI S30-0719E Safety Guideline For Use Of Energetic Materials In Semiconductor R&D And Manufacturing Processes (regarding heating of piping) | Refer below | |
| Line Item 1 - Enhancing guidance on overtemperature and undertemperature risk management. | Passed as balloted | |
| Line Item 2 - Adding, as ¶17.8.8, criteria specific to managing the risks of loss of heating downstream of process chambers. | Passed as balloted | |
| Line Item 3 - Improving the alignment of the Safety Guideline’s text with the Energetic Materials TF’s understanding of what criteria apply to which substances | Passed as balloted | |
| 7023 | Reapproval of SEMI S6-0618 Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment | Failed and returned to TF for rework and reballot | |
| SEMI S10-0423 | Safety Guideline for Risk Assessment and Risk Evaluation Process
(Unballoted editorial changes) | Passed. |  S10_ProceduralReview-EditorialChangeType2.pdf |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
Document # | Document Title | ISC A&R Action | A&R Forms |
| R6831C | Revision to SEMI S1-1015, Safety Guideline for Equipment Safety Labels | Passed |  R6831C_ProceduralReview.pdf |
Note 1: Passed Ratification ballots will be submitted to SEMI publication for final processing.
Note 2: Failed Ratification ballots were returned to the originating task forces for re-work and re-balloting or abandoning.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 7108 | SNARF | S1 Revision TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (labels) |
| 7109 | SNARF | S10 Revision TF | Line Item Revisions to SEMI S1, S2, S10, S14, and S30 (regarding risk to buildings/facilities) |
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | TF | Details |
| 6884B | Cycle 6 or 7-2023 | S2 Mechanical TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Mechanical) |
| 6888A | Cycle 6 or 7-2023 | S12 (Equipment Decon) Review TF | Revision of SEMI S12, Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination |
| 6907 | Cycle 6 or 7-2023 | S7 Revision TF | Revision to SEMI S7, Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications |
| 7021 | Cycle 6 or 7-2023 | S2/S22 Revision TF | Line Items Revisions of S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment |
| 7108 | Cycle 6 or 7-2023 | S1 Revision TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (labels) |
| 7109 | Cycle 6 or 7-2023 | S10 Revision TF | Line Item Revisions to SEMI S1, S2, S10, S14, and S30 (regarding risk to buildings/facilities) |
| TBD | Cycle 6 or 7-2023 | Ergonomics TF | Revision to SEMI S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| TBD | Cycle 6 or 7-2023 | S23 Global TF | Revision to SEMI S23 Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Abolished
# | TF | Title |
| 6309 | Ergonomics TF | Line Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of
Semiconductor Manufacturing Equipment |
| 6943 | Ergonomics TF | Line Item Revisions to SEMI S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| 6981 | Ergonomics TF | Line Item Revision to S8-0218, Safety Guideline for Ergonomics Engineering of
Semiconductor Manufacturing Equipment |
| 6595 | Fire Protection TF | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Adding Guidance for Materials of Construction Evaluation Related to Fire Risk Assessment) |
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
November 9, 2023 9AM -3 PM Pacific at SEMI HQ, Milpitas, CA in conjunction with NA Fall Meetings 2023. Check www.semi.org/standards for the latest update
Copyright ©2023 Semiconductor Equipment and Materials International (SEMI®). All rights reserved.
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