SEMI International Standards
Standards Locale: North America
Committee: Micropatterning
Place of Meeting: Online
Date of Meeting: 07/14/2021
Meeting End Date: 07/14/2021
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 07/15/2021
Leadership Changes
None.
TC Chapter Structure Changes
New Task Force |
Curvilinear Format Task Force
- L: Frank Abboud (Intel)
- L: Danping Peng (TSMC)
- L: Jin Choi (Samsung)
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Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 6807 | Reapproval of SEMI P5-0416 Specification for Pellicles | Passed as balloted |  6807 A&R.pdf |
| 6808 | Reapproval of SEMI P40-1109 (Reapproved 0416) Specification for Mounting Requirements for Extreme Ultraviolet Lithography Masks | Passed as balloted |  6808 A&R.pdf |
| 6809 | Reapproval of SEMI P48-1110 (Reapproved 0416) Specification of Fiducial Marks for EUV Mask Blank | Passed as balloted |  6809 A&R.pdf |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 6821 | SNARF | Curvilinear Format TF | New Standard: Specification for Improved Curvilinear Layout Representation |
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
| 6220 | Patterning Metrology Task Force | Line Item Revision to SEMI P19-92 (Reapproved 0707) SPECIFICATION FOR METROLOGY PATTERN CELLS FOR INTEGRATED CIRCUIT MANUFACTURE | July 14, 2022 |
| 6221 | Patterning Metrology Task Force | Revision to SEMI P18-92 (Reapproved 1104), SPECIFICATION FOR OVERLAY CAPABILITIES OF WAFER STEPPERS | July 14, 2022 |
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
TBD. Check www.semi.org/standards for the latest update.
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