SEMI International Standards
Standards Locale: North America |
Committee: EHS |
Place of Meeting: 12/17/2020 |
Date of Meeting: 12/22/2020 |
Meeting End Date: 12/22/2020 |
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Recording SEMI Standards Staff: Kevin Nguyen |
CER Posted to Web: 12/23/2020 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
Restriction of Materials TF | Steve Roberge (Axcelis) steps down | |
S2 Mechanical Design TF | | Andrew Petraszak (TEL) |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
6439 | New Standard: Practice For Restricting The Use Of PFOA, Its Related Compounds, Or Their Salts | Failed and returned to TF | |
6593 | Line Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision to Mechanical Design, Hinged Load Assembly) | See below | 6593_Ballot Review.pdf |
Line Item 1 - Revision to section 18.7.5 | Passed with technical changes. Ratification ballot will be issued |
6594 | Line Item Revisions OF SEMI S14-1016
Safety Guidelines For Fire Risk Assessment And Mitigation For Semiconductor Manufacturing Equipment | See below | 6594_Ballot Review.pdf |
Line Item 1 - Changes to Title and Concomitant text | Passed as balloted |
Line Item 2 - Changes to Risk Assessment Criteria | Passed as balloted |
6651 | Line Item Revision to SEMI S2-0818Ea
Environmental, Health, And Safety Guideline For Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Pressure System) | See below | |
Line Item 1 - Delayed Revision related to pressure systems | Failed and returned to TF | |
SEMI S30 Editorial Changes | Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes | Approved | SEMI S30_Editorial Changes.pdf |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
6696 | SNARF | S2 Mechanical Design TF | Line Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision on “date of shipment” currently in Sections 18.6.3 and 18.7.5) |
Authorized Ballots
# | When | TF | Details |
6354A | Cycle 1, 2 or 3-2021 | S2 Korean High Pressure Gas Safety TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Addition of related information) |
6049B | Cycle 1, 2 or 3-2021 | S10 Revision TF | Line Item Revision to SEMI S10-0815E, Safety Guideline for Risk Assessment and Risk Evaluation Process |
6171B | Cycle 1, 2 or 3-2021 | Chemical Exposure TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Chemical exposure) |
6439A | Cycle 1, 2 or 3-2021 | Restriction of Materials TF | New Standard: Practice for PFOA Restriction in Fluoromaterials |
6651A | Cycle 1, 2 or 3-2021 | S2 Pressure Guideline TF | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delay Revision related to pressure guidelines) |
6515 | Cycle 1, 2 or 3-2021 | S23 Revision TF | Line Item Revision of SEMI S23-1216 - Guide for Energy, Utilities, and Materials Use Efficiency of Semiconductor Manufacturing Equipment |
6696 | Cycle 1, 2 or 3-2021 | S2 Mechanical Design TF | Line Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision on “date of shipment” currently in Sections 18.6.3 and 18.7.5) |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
4975 | S6 Revision TF | Line Item Revision to S6, Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment (Re: gas detectors and other concerns) | July 2021 |
5996 | Ergonomics TF | Line Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment | July 2021 |
6309 | Ergonomics TF | Line Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment | Nov 2021 |
6171 | S2 Chemical Exposure TF | Line Item Revision to SEMI S2-0818E, Environmental, Health, and Safety Guideline For Semiconductor Manufacturing Equipment (Related to Oxygen Deficiency Assessment Criteria) | Nov 2021 |
6049 | S10 Revision TF | Line Item Revision to SEMI S10-0815E, Safety Guideline for Risk Assessment and Risk Evaluation Process | Nov 2021 |
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Tentative schedule is proposed for March 30-April 1, 2021. Draft schedule is listed. Check www.semi.org/standards for the latest update
EHS Spring2021_Rev1.xls.
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