SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: 12/17/2020
Date of Meeting: 12/22/2020
Meeting End Date: 12/22/2020
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 12/23/2020


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Restriction of Materials TFSteve Roberge (Axcelis) steps down
S2 Mechanical Design TFAndrew Petraszak (TEL)


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6439New Standard: Practice For Restricting The Use Of PFOA, Its Related Compounds, Or Their SaltsFailed and returned to TF
6593Line Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision to Mechanical Design, Hinged Load Assembly)See below6593_Ballot Review.pdf6593_Ballot Review.pdf
Line Item 1 - Revision to section 18.7.5Passed with technical changes. Ratification ballot will be issued
6594Line Item Revisions OF SEMI S14-1016
Safety Guidelines For Fire Risk Assessment And Mitigation For Semiconductor Manufacturing Equipment
See below6594_Ballot Review.pdf6594_Ballot Review.pdf
Line Item 1 - Changes to Title and Concomitant textPassed as balloted
Line Item 2 - Changes to Risk Assessment CriteriaPassed as balloted
6651Line Item Revision to SEMI S2-0818Ea
Environmental, Health, And Safety Guideline For Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Pressure System)
See below
Line Item 1 - Delayed Revision related to pressure systemsFailed and returned to TF
SEMI S30 Editorial ChangesSafety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing ProcessesApprovedSEMI S30_Editorial Changes.pdfSEMI S30_Editorial Changes.pdf


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6696SNARFS2 Mechanical Design TFLine Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision on “date of shipment” currently in Sections 18.6.3 and 18.7.5)


Authorized Ballots


#
When
TF
Details
6354ACycle 1, 2 or 3-2021S2 Korean High Pressure Gas Safety TFLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Addition of related information)
6049BCycle 1, 2 or 3-2021S10 Revision TFLine Item Revision to SEMI S10-0815E, Safety Guideline for Risk Assessment and Risk Evaluation Process
6171BCycle 1, 2 or 3-2021Chemical Exposure TFLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Chemical exposure)
6439ACycle 1, 2 or 3-2021Restriction of Materials TFNew Standard: Practice for PFOA Restriction in Fluoromaterials
6651ACycle 1, 2 or 3-2021S2 Pressure Guideline TFLine Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delay Revision related to pressure guidelines)
6515Cycle 1, 2 or 3-2021S23 Revision TFLine Item Revision of SEMI S23-1216 - Guide for Energy, Utilities, and Materials Use Efficiency of Semiconductor Manufacturing Equipment
6696Cycle 1, 2 or 3-2021S2 Mechanical Design TFLine Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision on “date of shipment” currently in Sections 18.6.3 and 18.7.5)



SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
4975S6 Revision TFLine Item Revision to S6, Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment (Re: gas detectors and other concerns)July 2021
5996Ergonomics TFLine Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing EquipmentJuly 2021
6309Ergonomics TFLine Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment Nov 2021
6171S2 Chemical Exposure TF Line Item Revision to SEMI S2-0818E, Environmental, Health, and Safety Guideline For Semiconductor Manufacturing Equipment (Related to Oxygen Deficiency Assessment Criteria)Nov 2021
6049S10 Revision TFLine Item Revision to SEMI S10-0815E, Safety Guideline for Risk Assessment and Risk Evaluation ProcessNov 2021


SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
Tentative schedule is proposed for March 30-April 1, 2021. Draft schedule is listed. Check www.semi.org/standards for the latest update
EHS Spring2021_Rev1.xlsEHS Spring2021_Rev1.xls.