SEMI International Standards
SEMI Standards Document Templates

Instructions for Use 

1) It is recommended that you save the Document file to your hard drive as a Word Template (.dot file). To do so, place the cursor over the link above, right click, and select the entry "Save Target As" or "Save Link As". Optionally, save the file to the templates subdirectory of your MS Word program.

Note: Consult your manuals of your operating system and MS Word for specific details on the location of this folder.

2) Create a New Document with the Document Template file.

Note: We are unable to support earlier releases of MS Word with our templates, or other programs such as Word Perfect.

Word (.dotx):

Word 1997-2003 (.dot):

Specification_2010.dotx

TestMethod_2010.dotx

Guide_2010.dotx

SafetyGuideline_2010.dotx

Practice_2010.dotx

Terminology_2010.dotx

Classification_2010.dotx

Specification_2003.dot

Test Method_2003.dot

Guide_2003.dot

Safety Guideline_2003.dot

Practice_2003.dot

Terminology_2003.dot

Classification_2003.dot
Updated May 21, 2012.

Questions, comments, suggestions, or problems?

Please contact Shannon Austin of SEMI Standards Publications at saustin@semi.org.