SEMI International Standards
SEMI Standards Document Templates

Instructions for Use 

1) To use the template correctly, it is recommended to save the file directly to your PC as a Word Template (.dotx file). 

2) Create a New Document using the template file.

Note: Refer to Microsoft support for instructions on how to download and save a custom template to your PC. 

Word (.dotx):

Specification_2023_v1.dotx TestMethod_2023v1.dotx Guide_2023v1.dotx SafetyGuideline_2023v1.dotx Practice_2023v1.dotx Terminology_2023v1.dotx Classification_2023v1.dotx

Updated Feb 1, 2023.

Questions, comments, suggestions, or problems?

Please contact your local Standards staff or email [email protected].