SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/31/2015Revised (if Applicable):

Document Number: 5872
SNARF for: Line Item Revision to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD)

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: GEM 300 Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
During ballot review of SEMI Document #5619A at the Fall 2014 Standards Meetings, some potential enhancements and additions to the document were identified and discussed. The higher priority items were included in ballot 5824. This document will propose the remaining additional enhancements.

In addition, other potential enhancements had been identified by the GEM 300 TF in the past. These will also be considered for inclusion in this proposal.

All these potential enhancements are listed in the Scope section.



b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This activity will result in changes to the specification resulting from the approval of SEMI Document #5619A. Those changes are based on potential revisions to the SEDD Specification identified previously by the GEM 300 TF and those raised by voters during balloting of 5619A and 5824.

The list of potential revisions follows. The GEM 300 Task Force will determine which of these is included in the final ballot.

* Addition of a section in the SEDD that describes the default/pre-defined collection event report definitions.
- These collection event report definitions sometimes serve as guidance to the user of suggested data to be collected for each collection event.

* Addition of a section in the SEDD that documents the available commands that can be accepted by the production equipment (including remote commands).

* Addition of a section in the SEDD that documents the SECS messages supported by the production equipment. This includes the structure of the messages so that it will document which of the possible alternate message structures is supported. The description of the message could describe the support message features (e.g. remote commands supported by S2,F41).

* Include documentation of the supported standards compliance tables showing what features are supported by the equipment.

* Leverage the 5620 SMN schema and remove the excerpts from that schema from the 5619A specification.

*For variables with multiple units, create a single structure with the unit, default value, minimum value, and maximum value. All variables with multiple units to include a list of these structures.


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2015b. 1st Draft by: 07/15/2015
c. (Optional) Informational Ballot by: d. Letter Ballot by: 11/01/2015
e. TC Chapter Approval By:11/01/2015

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
GEM300 TF (NA, Japan, and Korea)
Equipment Automation Committee (Europe)
Information & Control committee (Taiwan)

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will include reproduced copyrighted material



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
SEMATECH Document

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS04/01/2015
Recorded in TC Minutes04/01/2015

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on