Standards Doc. Bank

SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 4988
SNARF for: Revision to SEMI M9-0708, Specifications for Polished Monocrystalline Gallium Arsenide Slices


Originating Global Technical Committee: Compound Semiconductor Materials
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: GaAs/M9 Task Force


1. Rationale: M9 is due for 5-year review. Although its designation is 0708, all of its designation changes since 1999 have come from modifications to its subordinate standards.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Reapproval of SEMI M9.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 05/19/2010b. 1st Draft by: 07/01/2010
c. Preballot by: d. Technical Ballot by: 07/30/2010
e. Committee Approval By:06/01/2011

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on May 19, 2010