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SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5002
SNARF for: New Standard for Common EDA Metadata


Originating Global Technical Committee: Information & Control
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Diagnostic Data Acquisition Task Force NA


1. Rationale: The EDA standards suite is a key enabler for the next generation factory. Data provided via Interface A will be used by applications like predictive / preventative maintenance, FDC, virtual metrology, and other applications. A key component of the EDA standards suite and subsequent Interface A implementations is the concept of metadata. The so called "GEM 300" standards (including SEMI E30, E40, E87, E90, and E94) define many objects and state models that need to be represented in EDA metadata. These and other selected standards (e.g., E116, E148, and E157) should have a common representation in EDA metadata.

Current supplier EDA implementations have different E125 metadata representations of the GEM 300 state models and SEMI objects including the use of diverse naming conventions and identifiers for events and transitions. Creating a SEMI standard for the naming conventions and the identifiers of GEM 300 state models and SEMI objects will eliminate the need for each equipment supplier to analyze these standards and create this metadata separately (and almost certainly define it differently). The GEM 300 standards will not be changed as a result of this initiative.

This new standard would support the industry providing more consistent implementations. Consequently there would be less from scratch and unique implementation by OEMs and it would be easier to develop equipment and client software. This results in significant reduction in development time and effort for the OEM and the client software developer as they move to a new freeze level. This new standard will be designed to accommodate potential future changes to EDA (i.e., additional, new freeze levels).
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The scope for this initiative is to create a standard to hold standardized metadata definitions for constructs defined in commonly used equipment communication standards. The initial set is to provide EDA metadata definitions of StateMachines, type definitions, and SEMI objects for the SEMI standards: E30, E40, E87, E90, E94, E116, E148, and E157 at the 0710 level.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/30/2010b. 1st Draft by: 12/01/2010
c. Preballot by: d. Technical Ballot by: 02/01/2011
e. Committee Approval By:04/01/2011

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 14, 2010