| SEMI International Standards
Task Force Organization Form (TFOF) |
Task Force Name: International Reticle SMIF Pod and Load Port Interoperability Task Force
| Global Technical Committee: Physical Interfaces & Carriers |
| Originating Technical Committee Region: International |
1. Charter:
The task force will work on reticle SMIF pod and related LP standards to specify:
(1) Carrier Placement Sensing Pad locations, sizes and heights
(2) Info Pad for lockout features locations, sizes and heights
(3) Ports (e.g. used for purging) – locations, sizes
Furthermore, the task force will review the referenced documents of the LP and pod standards – a recent ballot comment has revealed missing or outdated references in the document.
It is the goal of the TF to make as small changes as possible to limit the impact of any of the changes for the industry. The intent is to affect future implementations, not existing implementations.
2. Scope:
The TF will work on the following documents:
E100, E111, E112, E117, E19.3 to address the challenges described above.
To minimize impact to industry, TF will consider adding as appendices or RI sections as alternative to adding in main body.
Note that this does NOT include EUV reticle carriers.
3. Formal linkages with Task Forces in other Regions:
Micropatterning Committee
European Automation Committee
JA PIC Committee
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4. Approval:
Task Force formed on: 07/14/2010