SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 01/15/2016Revised (if Applicable): 06/30/2020

Document Number: 5983
SNARF for: New Standard: Test method for In-Line Sheet Resistance Inspection Using the Junction Photo-Voltage Method


Originating Global Technical Committee: Photovoltaic
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: PV Equipment Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
With continuous advancements of modern science, photovoltaic technology has advanced leaps and bounds, and high sheet resistance and shallow depth of junction have become the research hotspot. In the manufacturing process of high-efficiency solar cells, the distribution of sheet resistance is a critical factor. Traditionally, the 4-point probes method is used as an effective way to detect sheet resistance in a diffused silicon wafer. However, this method only detects the sheet resistance at several locations on the silicon wafer and cannot reflect the sheet resistance distribution of each wafer. At the same time, this method is easy to cause damage to silicon wafers and difficult to realize the detection of each silicon wafer because it is a contact detection. As an undesired result, some sub-quality products flow into next processes, and produce some inefficient or ineffective cells, resulting in waste. To solve this problem, non-contact and in-line inspection method has been applied to sheet resistance detection. The standard not only presents a test method for in-line sheet resistance inspection, but also presents a way to calculate uniformity of each wafer. It has great significance for semi-finished product quality control, and can provide data support for the diffusion furnace manufacturers and solar cell manufacturers.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Silicon Solar cell manufacturers, Equipment manufacturers

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
In this document a test method for in-line sheet resistance inspection using the junction photo-voltage method is used to test the sheet resistance of diffused silicon wafers. This document contains the test principle, apparatus, test calibration, test procedures and calculation of uniformity of sheet resistance in a wafer.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 03/20/2016b. 1st Draft by: 12/20/2016
c. (Optional) Informational Ballot by: 03/30/2017d. Letter Ballot by: 08/30/2017
e. TC Chapter Approval By:11/30/2017

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
None

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 02/16/2016
Member Review End Date: 02/29/2016

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS03/15/2016
Recorded in TC Minutes04/01/2016

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10. SNARF Extension Dates:
TC Chapter Extension Granted on 04/23/2021
Extension Expires on03/15/2022