Standards Doc. Bank

SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 4979
SNARF for: New Standard: Specification for Round, Polished GaN Wafers


Originating Global Technical Committee: Compound Semiconductor Materials
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Gallium Nitride (GaN) Task Force


1. Rationale: GaN wafers are currently being sold by substrate manufacturers and used in development and by device manufacturers, but there are no SEMI specifications established. It is early enough in the development and use of round GaN wafers that standardization can be most effective.
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
A specification for round, polished Gallium Nitride wafers of various diameters will cover thickness, flat locations and lengths, laser marking location, surface orientation options, bow, TTV, etc.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 11/19/2010b. 1st Draft by: 01/14/2010
c. Preballot by: d. Technical Ballot by: 07/01/2010
e. Committee Approval By:06/01/2012

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on May 19, 2010