SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/12/2016Revised (if Applicable):

Document Number: 6085
SNARF for: Revision to SEMI F57- 0314, Specification For Polymer Materials And Components Used In Ultrapure Water And Liquid Chemical Distribution Systems, with title change to: Specification For High Purity Polymer Materials And Components Used In Ultrapure Water And Liquid Chemical Distribution Systems

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: High Purity Polymer Materials and Components Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

___________________________________________________________________________
1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The F57 original criteria was based on the quality of commercially available polymer materials and components used in manufacturing high purity systems. The original document was not based on the actual performance of those materials in the semiconductor industry. Since the last issue of this document certain events have occurred in which an advanced semiconductor facility was impacted by the contamination caused by high purity materials used in chemical delivery system. This lead to realization of inadequacy of the current F57 spec and resulted in another standard C90, addressing some of the issues. It was agreed that this document needs to be updated to proactively manage the risks associated with the high purity polymer materials used in the semiconductor process.
There are four areas that have been identified as needing to be addressed immediately:
· Tightening criteria for the components with the larger surface area.
· Define the frequency of testing should occur for the material supplier.
· Verify what chemical elements should be tested that are not listed in the current version.
· For the chemical elements listed in SEMI F057 with no definition of the criteria, define the criteria based on existing data.
· Consider updating criteria for particles with reference to SEMI F104.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

___________________________________________________________________________
2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Define the quality of materials used in the distribution of UPW and liquid chemicals distribution system materials completely to assure that materials will meet the contamination requirement of the semiconductor process.
Define the testing requirements by the component suppliers.


b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

___________________________________________________________________________
3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/03/2016b. 1st Draft by: 04/01/2017
c. (Optional) Informational Ballot by: d. Letter Ballot by: 05/01/2017
e. TC Chapter Approval By:07/15/2017

_____________________________________________________________________________
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
UPW ITRS and High Purity Water Task Force

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

___________________________________________________________________________
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

___________________________________________________________________________
6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

___________________________________________________________________________
7. Comments, Special Circumstances:
None.

__________________________________________________________________________
8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 07/28/2016.
Member Review End Date: 08/11/2016

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
__________________________________________________________________________

9. SNARF Approval Dates:
TC Chapter or GCS08/22/2016
Recorded in TC Minutes

__________________________________________________________________________

10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on