SNARF for Doc 6075

SEMI International Standards
Standards New Activity Report Form (SNARF)

Date Prepared: 08/11/2016

Revised (if Applicable): 04/10/2018

Document Number: 6075
SNARF for: New Standard: Guide for Describing Glass-Based Material for Use in 3DS-IC Process

Originating Global Technical Committee: 3D Packaging and Integration

Originating TC Chapter: North America

Task Force (TF) in which work is to be carried out: 3DP&I Bonded Wafer Stacks Task Force

Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Prior work in in the 3DS-IC Committee focused on identifying which parameters are needed for procuring glass for 3DS-IC applications. This Guide will define common parameters, e.g., dimensions, CTE, etc. for glass based materials for 3DS-IC applications.

b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: advanced packaging

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This standard will provide guidelines for glass for use as a base material for 3DS-IC applications.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones

a. Activity Start: 08/11/2016	b. 1st Draft by: 04/04/2017
c. (Optional) Informational Ballot by:	d. Letter Ballot by: 09/05/2018
e. TC Chapter Approval By:11/06/2018

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Silicon Wafer

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Silicon Wafer
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5. Safety Considerations:
The resulting document is expected:

NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Proposal to transform 3DS-IC and Assembly & Packaging Committees into a single, unified global technical committee (GTC) was approved at the International Standards Committee meeting held on July 13, 2017 during SEMICON West.

Proposal Details:
To transform the 3DS-IC GTC and the Assembly & Packaging GTC into a Unified GTC
To name the transformed GTCs as "3D Packaging and Integration" GTC
Each TC chapter of the unified GTC will inherit the co-chairs of the existing TC chapters

All records were moved to the new 3D Packaging and Integration GTC.
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Original SNARF prepared August 11, 2016, went out for two-week review 07/20/2016 - 08/03/2016.

Revision SNARF sent out for another two-week review: 03/13/2018-03/26/2018. Edits were made during the TC Chapter meeting.
-Approved at NA Spring 2018 Meetings

Revision SNARF sent out for another two-week review: 06/20/2018-07/03/2018.
-Approved at SEMICON West 2018 Meetings

Passed A&R Cycle 6-2019.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 06/20/2018
Member Review End Date: 07/03/2018

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ś 8.2.1)
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9. SNARF Approval Dates:

TC Chapter or GCS	07/12/2018
Recorded in TC Minutes	07/12/2018

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10. SNARF Extension Dates:

TC Chapter Extension Granted on

Extension Expires on

SNARF_Guide for Describing(revisionv2) during meeting.doc 6075 Revision SNARF.doc