SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/06/2012Revised (if Applicable):

Document Number: 5389
SNARF for: Revision to MF1982-1110, Test method for analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography

Originating Global Technical Committee: Silicon Wafer
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: Test Method Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
MF 1982 should be revised from the following reasons:
1. MF1982 has two methods, which are Method A and B. They should be unified because the difference between Method A and Method B is only form of wafer, which is full wafer or cleaved wafer.
2. Some organic compounds are difficult to be measured by TD/GCMS. These are volatile compounds, amines, polar compounds (fatty acids, etc.), and high-polymer organic compounds. It is preferable to use other analysis methods together such as Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS), Inductivity Coupled Plasma High Resolution Mass Spectroscopy (HR-ICPMS), and Capillary Electrophoresis Time-of-Flight Mass Spectroscopy (CE/TOF-MS).
3. MF1982 is now an authorized measurement method of ITRS. MF 1982 should be updated to improve precision, accuracy, and sensitivity with the latest technology and meet needs from ITRS.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
MF 1982 should be revised from the following reasons: MF1982 has two methods, which are Method A and B. They should be unified, because the difference between Method A and Method B is only form of wafer, full wafer or cleaved wafer. Some organic compounds are difficult to be measured by TD/GCMS. These are volatile compounds, amines, polar compounds (fatty acids, etc.), and high-polymer organic compounds. It is preferable to use other analysis methods together such as Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS), Inductivity Coupled Plasma High Resolution Mass Spectroscopy (HR-ICPMS), and Capillary Electrophoresis Time-of-Flight Mass Spectroscopy (CE/TOF-MS). MF1982 is now an authorized as a measurement method of ITRS. MF 1982 should be updated to improve precision, accuracy, and sensitivity with the latest technology and meet needs from ITRS.

Additionally, the range of lower detection limits of this test method depends on the species of organic compound. However, generally for organic compounds, it ranges from subpicogram to nanogram per square centimeter of silicon-wafer surface (pg/cm2 to ng/cm2). The lower detection limit when the molecular weight is assumed as 300 and carbon numbers as from 10 to 20 is in the range of 5e10–5e11 molecules/cm2, 1e12-1e13 C atoms/cm2. This test method can be used for various materials depending on the purposes, but mainly for bare silicon wafers.


b: Expected result of activity
Revision to an existing Standard/Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 12/08/2011b. 1st Draft by: 06/20/2012
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/07/2012
e. TC Chapter Approval By:12/06/2012

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
International Test Methods Task Force

b. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology or a copyrighted item(s) is NOT required

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include copyrighted material



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
None.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS03/06/2012
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on


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