Standards Doc. Bank

SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5027
SNARF for: New Subdocument for SEMI F1, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components


Originating Global Technical Committee: Facilities
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: F1 Revision TF


1. Rationale: Task Force has been examining revision of SEMI F1-96. Task Force decided to revise current F1 and add new item as sub-document.
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The task force will add new item as follows as sub-document of the SEMI F1.
-Add new inboard criteria to the leak rate limit.

b: Expected result of activity
Other

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 06/18/2010b. 1st Draft by: 03/01/2011
c. Preballot by: d. Technical Ballot by: 04/01/2011
e. Committee Approval By:06/01/2011

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on June 18, 2010