Standards Doc. Bank

SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5047
SNARF for: Revision to SEMI P10, Specification of Data Structures for Photomask OrdersRevision to SEMI P10, Specification of Data Structures for Photomask Orders


Originating Global Technical Committee: Micropatterning
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Mask Orders Task Force


1. Rationale: This revision will implement new photomask ordering and results reporting requirements as they arise throughout 2010. In particular, improvements will provide for:

Developing a third P10 data structure for “pre-order”. This would alert a mask supplier to an imminent order so that preparations could be made in advance of the actual order.
Items discussed during 2009 but not yet submitted for ballot.
Any other new issues or needs as they arise
Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
All areas of the standard are open for changes. Consideration will be given to minimize the impact on those who have already implemented previous revisions of the standard.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 01/12/2010b. 1st Draft by: 12/01/2010
c. Preballot by: d. Technical Ballot by: 01/01/2011
e. Committee Approval By:03/01/2011

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 13, 2010