SNARF for Doc 5832

SEMI International Standards
Standards New Activity Report Form (SNARF)

Date Prepared: 02/05/2015

Revised (if Applicable): 10/20/2017

Document Number: 5832
SNARF for: New Standard, Specification for Equipment Generic Counter Model (EGCM)

Originating Global Technical Committee: Information & Control

Originating TC Chapter: Korea

Task Force (TF) in which work is to be carried out: GEM 300 Task Force

Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

1) Background
Chipmaker and equipment provider wants to manage the hardware parts because accident is related to quality of product and uptime. If user can recognize that specific parts reach to the life time, user is able to prepare to change/replace/overall before accident occurred.
Most of semiconductor equipment provides count information, like processed wafer's count of specific module, and it is useful, and chipmakers are using the counter information.
The count methods of equipment companies were different because there was no standard so far.
User wants to manage the parts of module instead of process module, like switching valve and gate valve,
And also Chipmaker wants to manage this information through Factory Automation feature.

This can be applied to manage the PM (Preventive Maintenance) cycle of specific module and parts.
Equipment provider and Chipmaker can protect quality accident by defective parts, and they can schedule the Preventive Maintenance time of tool which they are in charge of.
And also user is able to control the counter more easily by using Factory Automation feature.

Others might use this to detect process faults.
Because the count information of specific parts sometimes means result of process in process time.

2) Purpose
-This is a new SEMI-Standard for counter object and counter service.
-Provide how to use counter object

b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: factory automation, component suppliers, manufacturer and solution provider

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

1. This is a new SEMI-Standard for counter object and counter service.

2. Provide count method
- Count Method for Digital Signal
- Count Method for Analog Signal
- Count Method for Event Signal

3. Provide how to use counter object
- Counter Object Model
- State Machines
- Attributes

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones

a. Activity Start: 02/05/2015	b. 1st Draft by: 07/22/2015
c. (Optional) Informational Ballot by: 11/01/2015	d. Letter Ballot by: 07/22/2015
e. TC Chapter Approval By:10/31/2018

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Information & Control global technical committee, Automation Technology global technical committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):

c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):
Information & Control
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5. Safety Considerations:
The resulting document is expected:

NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

will NOT include reproduced copyrighted material

NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
1. First SNARF was approved on 01/05/2015
2. SNARF revised title from "New Standard, Specification for Generic Counter Model (GCM)" to "New Standard, Specification for Equipment Generic Counter Model (EGCM)" on Oct 20, 2017

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 01/19/2015
Member Review End Date: 02/02/2015

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ś 8.2.1)
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9. SNARF Approval Dates:

TC Chapter or GCS	10/20/2017
Recorded in TC Minutes

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10. SNARF Extension Dates:

TC Chapter Extension Granted on

Extension Expires on

SNARF_5832_v2_approved.doc