SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/24/2013Revised (if Applicable):

Document Number: 5700
SNARF for: New Standard:Test Method for Substituted Carbon Content of Crystalline Silicon by Multiple Transmission-reflection Infrared Absorption

Originating Global Technical Committee: Photovoltaic
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: PV Silicon Raw Materials Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The substituted carbon impurity level in silicon plays an important role in the physical, chemical, electrical, and mechanical properties of silicon for fabrication of devices such as computer silicon chips and solar cell panels. Infrared spectroscopy is the standard method to measure the substituted carbon atomic concentration in silicon (SEMI MF1391, detection limit of carbon at 2 mm silicon wafer is 5×1015at•cm-3). The newly established Multiple-Transmission-Reflection Infrared Spectroscopy (MTR-IR) (J. Phys. Chem. A 2008, 112, 12372) provides the most sensitive method at room temperature to measure accurate values of interstitial oxygen and substituted carbon impurity concentrations respectively. Moreover the MTR-IR method eliminates the interference fringes resulted from the thin silicon slice less than 0.3 mm, which provides a suitable method for measurement of substituted carbon concentration in the solar cell panels at its most accepted thickness of 0.19 mm with a detection limit up to 5×1015at•cm-3. Most importantly, it is a suitable method to measure thin silicon wafers among 0.1~0.3 mm thickness, which is the most accepted thickness in solar cell industry and is challenged by the interference fringes with the convenient infrared method.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Multi- and single crystalline silicon materials used in Semiconductor and Solar Cell industries.

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The current standard infrared method (SEMI MF1391, detection limit of oxygen at 2 mm silicon wafer is 5×1015at•cm-3) cannot measure crystalline silicon wafers less than 0.3 mm thickness. MTR-IR measurement can be carried out on both multi- and single crystalline silicon wafers. It extends the detection limit of carbon at 0.19 mm silicon wafer to 5×1015at•cm-3. Most importantly, it is a suitable method to measure thin silicon wafers among 0.1~0.3 mm thickness, which is the most accepted thickness in solar cell industry and is challenged by the interference fringes with the convenient infrared method.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2014b. 1st Draft by: 12/31/2014
c. (Optional) Informational Ballot by: d. Letter Ballot by: 06/30/2015
e. TC Chapter Approval By:12/31/2015

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Global Photovoltaic Materials Committee
Global Silicon Wafer Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:


Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS03/20/2014
Recorded in TC Minutes03/20/2014

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on