SEMI International Standards
Date Prepared: 07/14/2022
Revised (if Applicable):

Name of Task Force (TF): Environmental Performance Rating (EPR) Task Force

Global Technical Committee: EH&S
Originating Technical Committee Region: North America

1. Charter: (State the objective of the proposed TF.)
Develop a method for rating the environmental performance of certain components (e.g., vacuum pumps) used in semiconductor manufacturing, based in part on S23. We aim to define a fair and transparent system that will simplify the comparison of equivalent energy efficiency and other elements of environmental performance across components manufacturers and promote consideration of the same during equipment selection by their customers.
2. Scope: (Define the specific activities that the TF will conduct.)
This task force will develop candidate rating frameworks for certain component categories and, if sufficient consensus is found, submit as a ballot for a new EHS standard.

We propose that this task force be separate from the S23 task force because the key challenge of developing a rating method for comparing environmental performance among similar components and defining the scoring system (e.g. 5-star rating system) are not robustly related to S23. Nonetheless we anticipate that S23 will be heavily referenced for expressing equivalent energy consumption within the rating method.

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
S23 Revision Global Task Force
4. Formation Date:(TF formed on)

Task Force formed on: 07/14/2022
Task Force approved by Committee/GCS on: 07/14/2022