SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 05/19/2021

Revised (if Applicable):

Name of Task Force (TF): M9 Revision Task Force

Global Technical Committee: Compound Semiconductor Materials

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Remove two obsolete subdocuments from M9, and modify the title of one subdocument.
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2. Scope: (Define the specific activities that the TF will conduct.)
1) Remove M9-1 (Specification for Round 50.8mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications) as obsolete.
2) Remove M9-6 (Specification for Round 125mm Diameter Polished Monocrystalline Gallium Arsenide Wafers) as obsolete.
3) Change the title of M9-5 from Specification for Round 100mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications to Specification for Round 100mm Polished Monocrystalline Gallium Arsenide Wafers.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on: 05/19/2021
Task Force approved by Committee/GCS on:

5. Comments
None.