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SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5029
SNARF for: Revision to SEMI M51-0303, Test Method for Characterizing Silicon Wafers by Gate Oxide Integrity


Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: Test Method Task Force


1. Rationale: SEMI M51-0303 has been widely used for characterizing silicon wafer quality by GOI (Gate Oxide Integrity). It is needed to review for reapproval. Document format is old. So, entire document is reformatted to be compliant with current SEMI Style Manual. GOI is originally developed to detect COP (Crystal Originated Particle/Pit) but it is now known as a test method sensitive to other surface qualities such as contamination. Because, at the same time, document is updated considering extended application of GOI as a sensitive and effective tool to qualify wafers for device production.
Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Revision of SEMI M51-0303.
SEMI M51 provides a metrology for characterizing single crystal silicon wafer.
This document describes the minimum condition to the GOI (TZDB : Time Zero Dielectric Breakdown) measurements.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 04/01/2010b. 1st Draft by: 08/01/2010
c. Preballot by: d. Technical Ballot by: 10/04/2010
e. Committee Approval By:12/01/2010

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on June 24, 2010