SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 06/30/2014Revised (if Applicable):

Document Number: 5737
SNARF for: Revision of SEMI MF1391-1107, Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption

Originating Global Technical Committee: Silicon Wafer
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: Japan Test Method Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
JEITA standard documents on test method for silicon wafer are facing difficulties to be maintained due to the dissolution of corresponding JEITA committee. Those JEITA standards have been referred to by some of SEMI Standard documents. Therefore, important descriptions (or documents) in JEITA documents are required to be transferred to the corresponding SEMI Standards. The purpose of this activity is to transit effective descriptions from JEITA document to SEMI Standard, regarding test method for carbon content of silicon.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
IV: Extremely Difficult - Expertise and resources are scarce and/or achieving consensus is very difficult

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The scope of this activity is to add a new short range for determining baseline. The purpose of this addition is to determine better baseline for silicon with low carbon content.
Current Standard employs a range from 640 to 560 cm-1. This long range has been required for silicon with high carbon content, which produces a large absorption peak height and broad peak width. Silicon products in recent year contain carbon as low as 1x1015/cm-3 so that the absorption peak has become smaller and narrower. It has become harder to determine baseline with current baseline range, since the background deviation within such a long range is comparable to the small absorption peak height. This has not been the case with high carbon content silicon, since the background deviation has not been significant compared to the large absorption peak.
The authors propose a new range from 615 to 580 cm-1 to be employed in Test Method, and current range from 640 to 560 cm-1 to be cited as an appendix. The similar description is found in SEMI MF1188-1107 Test Method for Interstitial Oxygen Content of Silicon by Infrared Absorption with Short Baseline. In SEMI MF1188-1107, a short range is employed in the main Test Method, and the original (long baseline) method is cited as Appendix 1.


b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 06/12/2014b. 1st Draft by: 08/31/2014
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/22/2014
e. TC Chapter Approval By:12/03/2014

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:


Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS06/12/2014
Recorded in TC Minutes06/12/2014

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on