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SEMI International Standards
Task Force Organization Form (TFOF)


Task Force Name: 5-year-review TF


Global Technical Committee: Facilities
Originating Technical Committee Region: Japan


1. Charter:

To update Facilities Standards with latest information and industry accepted terms.

2. Scope:
This task force will limit its activities to Facilities related standards.

3. Formal linkages with Task Forces in other Regions:
None.

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4. Approval:
Task Force formed on: 06/18/2010