SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/16/2016Revised (if Applicable):

Document Number: 6129
SNARF for: Revision to SEMI F61-0301 (Reapproved 0309) Guide for Ultrapure Water System Used in Semiconductor Processing, with title change to: Guide to Design and Operation of a Semiconductor Ultrapure Water System

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Ultra Pure Water Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

Existing revision of SEMI F061 provides definitions for UPW system processes, components, and elements. However, it does not provide actual guide for neither design nor operation of the UPW systems. Growing complexity of the modern semiconductor technology increases the importance of the UPW quality of the advanced semiconductor facilities. The purpose of this effort is to identify key elements that when adequately defined would help the facilities to reach and maintain the UPW quality requirements as defined in the most recent revision of SEMI F063. The intent is also to provide an interpretation of the value of other SEMI documents such as SEMI F57, F40, F63, F104, C79, and others to the UPW System and UPW quality produced.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Advanced semiconductor factories with line width of 65nm and beyond

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

The areas to be covered by this activity include the following:
- UPW system design considerations/criteria
- UPW components quality criteria
- UPW system operational recommendations


b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/08/2016b. 1st Draft by: 12/15/2016
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/03/2017
e. TC Chapter Approval By:04/03/2017

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
1) UPW ITRS Group, Yield Enhancement & Wafer environment and contamination control (WECC) (US and Europe, working with coordination with group in Asia);
2) SEMI Standards Facilities Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

UPW ITRS committee has developed an extensive amount of information that will be valuable in supporting the update. This takes into account involvement of the key end users in the ITRS development. UPW ITRS also supports the need of having UPW specification development outside of the ITRS effort. ITRS defines the needs of future technologies, instead of specifying design criteria for current plants. UPW ITRS group supports this guide development, following the timelines of the revision update every 2 years.
.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 11/22/2016.
Member Review End Date: 12/07/2016.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/16/2016
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on